A major step towards Green Fab in the semiconductor production, this phase-fluid based technology establishes new standards in environmental friendliness, work safety and fab compatibility.
Now, fewer process steps are required during production, saving both time and expendable materials and allowing for new application scenarios in process integration. In contrast to conventional methods in which, for example, aggressive solvents and toxic chemicals are used to dissolve a photoresist to be subsequently disposed of in a costly manner, phase fluids infiltrate, fragment and “lift” corresponding layers defect-free from the water surface. The phase fluid and detached photoresist are rinsed with DI (deionized) water and removed without leaving residue.
Matthias Rudolph, Fraunhofer IPMS-CNT announces, “Intelligent fluids finally provide a physically-effective, CMOS-compatible cleaning product that can be integrated into semiconductor manufacturing.” Igor Eichinger, Category Manager at intelligent fluids GmbH continues, “Because only smart and mild ingredients are used in phase fluid cleaning, our technology sets new standards with regard to performance, pollutant reduction, biocompatibility and workplace safety in microchip manufacturing.”
intelligent fluids GmbH has been supplying well-known semiconductor manufacturers throughout Europe, Asia and the USA with products for photoresist removal, metal lift-off and equipment cleaning for years. Today, preliminary work for qualifying the newest intelligent fluids technology for front-end photoresist removal is underway in the Fraunhofer IPMS-CNT Screening Fab. Here, phase fluids are being further developed from laboratory scale to industrial application in 300-mm production fabs and tested for their suitability for use in industry-specific production processes. Sponsored by the Saxon State Ministry of Economic Affairs, Labor and Transport (SMWA), the joint project (Registration Number 10284497) aims to qualify products and processes in individual pilot lines for subsequent industrial production over the next two years.
For expert discussions you will find intelligent fluids at booth B1-216 and Fraunhofer IPMS at booth B2-317 at SEMICON Europa, the largest event for microelectronics and semiconductor manufacturing in Europe, from November 14 to 17, 2017 in Munich.