Acoustic Sensors

Acoustic sensors make sound, ultrasound, and structure-borne vibrations accessible for precise measurement and detection tasks. At Fraunhofer IPMS, the focus is on MEMS-based approaches, including capacitive micromachined ultrasonic transducers (CMUTs) and vibration sensors based on the NED technology platform.

CMUTs combine high sensitivity, broad frequency bandwidths, and a compact design. They are suitable for measurements in dark, turbid, or optically inaccessible environments and can be integrated with CMOS electronics. Manufacturing in the 200 mm MEMS cleanroom enables the development of customized sensors, modules, and systems up to pilot production. MEMS vibration sensors detect structure-borne sound and mechanical vibrations with broad bandwidth, high linearity, and long-term stability.

Key application areas include ultrasound imaging, photoacoustics, medical diagnostics, and condition monitoring. The technologies also address predictive maintenance, infrastructure monitoring, wearables, and automotive applications. They enable reliable condition monitoring through contactless or vibration-based sensing and the generation of high-quality measurement data. Fraunhofer IPMS supports partners from feasibility studies and prototyping through to system integration for customized acoustic sensor and measurement solutions. This approach enables application-oriented technologies for industrial and medical challenges with diverse integration requirements and specific operating environments.