Development of products and technologies in the field of micro-(opto)-electro-mechanical systems (MEMS and MOEMS) including pilot fabrication.
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M3Infekt project launched.
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Interview on the Fraunhofer spin-off Arioso Systems GmbH.
MEMS based electrostatic bending actuators.
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Development of products and technologies for MEMS and MOEMS including pilot fabrication.
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