Reducing Greenhouse Gas Emissions in Cleanrooms
Fraunhofer IPMS focuses on reducing the environmental impact of technical gases and refrigerants used in the cleanroom. Through detailed analysis of current consumption patterns, the initiative aims to create transparency and identify optimization potential. At Fraunhofer IPMS, ISO certifications and a modern building management system already enable precise annual tracking of greenhouse gas usage.
Innovative measurement technologies are being developed to record exact gas consumption and continuously monitor exhaust emissions. This includes real-time tracking of unprocessed greenhouse gases, which is essential for calculating their true impact on the climate. The collected data will contribute directly to the organization's overall greenhouse gas (GHG) balance.
Reducing Greenhouse Gas Emissions from Technical Gases in Semiconductor Manufacturing
Initial findings show that fluorinated specialty gases, although used in relatively small quantities, contribute disproportionately to GHG emissions due to their high Global Warming Potential (GWP). One major goal of the project is to determine how much of these gases are actually emitted into the atmosphere versus being consumed or neutralized via scrubbers and burners.
By developing a reliable data collection concept and integrating it into the Fraunhofer GHG balance, the project helps pave the way for greener microelectronics and sustainable cleanroom operations.