GENESIS: Generate in Europe a Sustainable Industry for Semiconductors

Project GENESIS minimizes ecological footprint in Europe’s semiconductor industry

A pan-European consortium dedicated to developing sustainable processes and technologies for the semiconductor-manufacturing supply chain announces the launch of the GENESIS project. This integrated, large-scale initiative aims to enable Europe’s chip industry to meet its sustainability goals – from material development to final waste treatment. Fraunhofer IPMS takes a managing role for one of the central work packages in order to minimize chemical waste and reduce emissions.

Fraunhofer IPMS to minimize chemical waste and reduce emissions in the GENESIS project

Fraunhofer IPMS takes a managing role for one of the central work packages in order to minimize chemical waste and reduce emissions. In addition, the research institute is investigating the substitution of harmful materials and substances used in semiconductor production. The focus here lies on alternatives for PFAS (perfluorinated and polyfluorinated alkyl substances) and climate-damaging gases in the BOSCH process. The respective project section will examine certain improved recycling techniques, analyze abatement efficiency and even develop new systems.

The mindful use of resources will be central to our efforts in the GENESIS project. We are concentrating on replacing and reducing the emission of climate-damaging gases such as SF6 or NF3. These gases are 10,000 times more harmful than CO2, but are needed in the semiconductor industry. We are also working to reduce the waste produced during chemical mechanical polishing.

About the project

Coordinated by CEA-Leti, the three-year project brings together 58 partners spanning the entire European semiconductor value chain, from large industrials and SMEs to research institutes, universities, and industry associations.

GENESIS  will drive innovative solutions in emission control, eco-friendly materials such as alternatives to PFAS-based chemicals, waste minimization and raw material reuse, directly in line with the European Green Deal and European Chips Act.

The project expects to deliver approximately 45 sustainability-driven innovations covering the semiconductor lifecycle. Four strategic pillars support the goal of a green European semiconductor industry, guided by four strategic pillars that form the technological foundation of GENESIS’s vision for a green European semiconductor industry. The project will work on monitoring and sensing strategies for emission tracking, PFAS-free and low global warming potential (GWP) materials, strategies for waste reduction and minimization of scarce materials as well as strengthening resource security.

Complementing these core objectives, the project’s goals establish an overall framework that includes deploying sensor-integrated abatement systems to reduce emissions, and positioning Europe as a leader in green semiconductor innovation by aligning supply chain practices with environmental regulations.

Project partners:

Commissariat à l'énergie atomique et aux énergies alternatives, Aalto Korkeakoulusaatio SR, Aixtron SE, ArgYou AG, Arkema France SA, BESI Netherlands BV, Fundació Institut Català de Recerca de l'Aigua, Centrotherm Clean Solutions GmbH, CS Clean Solutions GmbH, CSEM Centre Suisse d'Électronique et de Microtechnique, Edwards Ltd, Fäth GmbH, FEI Electron Optics BV, Fraunhofer Gesellschaft zur Förderung der Angewandten Forschung, Gasera Oy, GlobalFoundries Dresden Module One LLC & Co. KG, IBM Research GmbH, Interuniversitair Micro-Elektronica Centrum, Infineon Technologies AG, Intel Research and Development Ireland Limited, LayerOne AS, Leonardo - Società per Azioni, Merck Electronics KGaA, Mersen France Gennevilliers SAS, Molymem Limited, NXP Semiconductors Netherlands BV, Pfeiffer Vacuum, PiBond Oy, Picosun Oy, Politecnico di Milano, Robert Bosch GmbH, Franz Schmidt & Haensch GmbH & Co., Screen SPE Germany GmbH, SEMI Europe GmbH, SINTEF AS, Soitec SA, STMicroelectronics SRL, STMicroelectronics (Malta) Ltd., Tokyo Electron Europe Limited, Thermo Onix Ltd, Nederlandse Organisatie voor Toegepast Natuurwetenschappelijk Onderzoek, TOFWERK AG, Trymax Semiconductor Equipment BV, University College Cork - National University of Ireland, Università degli Studi di Catania, Università degli Studi di Roma Tor Vergata, Université Catholique de Louvain, University of Leicester, Variolytics GmbH, VOCSens SRL, Teknologian Tutkimuskeskus VTT Oy, WEEEcycling, Università ta' Malta, Technic France, Technic Ultra Pure, HQ-Dielectrics GmbH, Thermo Fisher Scientific (Bremen) GmbH, STMicroelectronics Rousset SAS, STMicroelectronics Crolles 2 SAS.

More info on our cleanrooms:

 

Services

200 mm MEMS Cleanroom

 

Services

300 mm CMOS Cleanroom

Funding note

GENESIS is an EU program supported by CHIPS JU and its associated members states. In addition, GENESIS Swiss partners are supported by the Swiss state secretariat (SERI)

Project webseite