Optical Actuators

Optical actuators control and manipulate light in miniaturized systems. At Fraunhofer IPMS, research and development focuses on MEMS scanners, scan engines, spatial light modulators, and other integrated optical components for precise beam steering, modulation, focusing, and optical switching.

MEMS scanning mirrors are operated in either resonant or quasi-static modes, enabling compact solutions for beam steering, laser projection, 3D metrology, and spectroscopy. Spatial light modulators are based on micromirror arrays with application-specific ASIC architectures. Individually addressable mirrors can be tilted continuously, supporting applications such as microlithography, semiconductor inspection, adaptive beam shaping, and holography. Complementary technologies extend the portfolio to include OLED-on-silicon microdisplays, tunable microlenses, and liquid crystal waveguides. These components are designed for applications including smart glasses, miniaturized autofocus and zoom systems, as well as optical switches for fiber-optic sensor networks.

Fraunhofer IPMS addresses a wide range of applications in optical metrology, medical imaging, display technologies, optical communications, and augmented reality (AR). Its expertise covers the entire development chain, from MEMS design and electronic control to packaging, pilot manufacturing, and system integration. Industrial and research partners benefit from customized optical actuator and microsystem solutions that precisely guide, dynamically shape, and seamlessly integrate light into complex technical systems.