Actuators
Components & Systems
Mechanical Actuators:
Mechanical Actuators
Micromachined Ultrasonic Transducers (CMUT)
Ultrasonic Sensors
Lateral Micromechanical Ultrasonic Transducer (L-CMUT)
Mechanical Actuators
Energy Harvesting
Optical Actuators:
Optical Actuators
MEMS Scanners
Optical Actuators
Spacial Light Modulators
Optical Actuators
Tunable Lens
Optical Actuators
LC Waveguide
Fraunhofer Institute for Photonic Microsystems