MEMS Scanners

MEMS Scanning Mirror

© Fraunhofer IPMS
MEMS scanning mirror

Scanning mirrors, either resonantly or quasi-statically operated, are the technology of choice when it comes to selectively deflecting light with very compact systems. At Fraunhofer IPMS you will find technological competence for component and system development and application know-how from more than 10 years of development work in equal measure.

In recent years, Fraunhofer IPMS has developed more than 50 different resonant MEMS scanners, which are used as one- or two-dimensional deflecting elements or also for optical path length modulation. Possible scanning frequencies range from about 0.1 kHz up to 100 kHz. Applications range from bar code reading systems and 3D metrology to laser projection, spectroscopy and focus position modulation. A practical example is a scanner mirror with diffraction grating for spectroscopic applications. This has been offered commercially since 2007 by HiperScan GmbH, a spin-off of Fraunhofer IPMS, in a novel near-infrared microspectrometer. In addition, Fraunhofer IPMS is working on application-specific scanner mirrors, e.g. for Fourier transform spectrometers, confocal microscopy, highly miniaturized displays, ultra-compact laser projection systems, for image acquisition in endoscopes and for distance measurement (triangulation).

In addition to resonant scanners, quasi-static deflectable microscanners are also being developed for applications such as laser beam positioning or vector scanning. 

Interested parties have the opportunity to receive customer evaluation kits (CEK), based on in stock mirrors including packaging, driver electronics and software. Depending on the intended customer evaluation it is possible to adapt the CEK to specific requirements. We gladly develop custom specific scanning solutions for your application and provide MEMS-scanner dies or scan-modules qualified and in numbers via a pilot fabrication.

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High performance MEMS mirrors for LiDAR sensors.

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