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Fraunhofer IPMS Webinars

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Webinar Archive#

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12 Advanced Technology and Hardware for Next Generation Computing click here
11 Optical and Electrical Microsystems for Advanced Biomedical Imaging and Diagnosis click here
10 MEMS Technologies and Applications click here
09 Low Frequency MEMS Ultrasound Transducers click here
08 MEMS Technologies for Vehicle Environment Detection click here
07 Smart Systems for Medical and Health click here
06 Capacitive Micromachined Ultrasonic Transducer (CMUT) – From Concept to Device click here
05 Fe- FET - A Memory Device for Maximum Integration click here
04 Automotive LIDAR Technologies click here
03 Fraunhofer IPMS Micro Mirror Arrays - Versatile Spatial Light Modulation click here
02 The power of Micropump – A big idea in a small package click here
01 Li-Fi - Communication at the Speed of Light click here

Advanced Technology and Hardware for Next Generation Computing#

Dr. Wenke Weinreich, Dr. Benjamin Lilienthal-Uhlig & Fritz Herrmann (Fraunhofer IPMS)

With the Center Nanoelectronic Technologies (CNT), Fraunhofer IPMS conducts applied research on 300 mm wafers for microchip producers, suppliers, equipment manufacturers and R&D partners. We offer the following Ultra Large Scale Integration-level (ULSI) technology developments and services in FEoL and BEoL. In this webinar we provide a short introduction about our services and give an outlook about the research fields of the next years in this area.

Optical and Electrical Microsystems for Advanced Biomedical Imaging and Diagnosis#

Dr. Michael Scholles (Project Hub MEOS)

Medical diagnosis relies heavily on innovative biomedical imaging methods. New system concepts combining miniaturized optical MEMS components, such as scanner mirrors and spatial light modulators, with new methods for realizing passive micro-optics enable a variety of different new biomedical products. This webinar will describe the technical realization of these systems and their biomedical applications in more detail.

MEMS Technologies and Applications#

Fritz Herrmann (MEMS Technologies)

Fraunhofer IPMS develops products and technologies in the field of micro-electromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) for its customers. Our capabilities cover the entire development arc for MEMS and MOEMS products and technologies. On request, we can undertake pilot and small batch production in-house or support technology transfer to a facility of the customer's choice. We leverage our existing technological capabilities for bulk MEMS, surface MEMS and monolithic integration of CMOS and MEMS/MOEMS. Our work is performed in a state-of-the-art MEMS clean room capable of handling 200-mm wafers. The webinar will provide technical insights into our MEMS technologies and applications for the market.

Low Frequency MEMS Ultrasound Transducers#

Dr. Bert Kaiser (Monolithically Integrated Actuator and Sensor Systems)

Human-machine interface technology is becoming increasingly important as ubiquitous technology moves toward requiring full awareness to be decoupled from the user experience. Hearables, which rely on an audio interface without blocking the visual or tactile senses, are a prominent example. Other applications require "silence" for a variety of reasons, while still maintaining the need for convenience and ease of use. Gesture recognition will then play a key role in recognizing user input for various technologies without requiring direct contact or precisely targeted or timed (inter)actions. MEMS-based ultrasonic transducers enable gesture recognition systems that can be produced at a low unit price for high volumes, making them as available as inertial sensors were in the past. With the NEDMUT technology, Fraunhofer IPMS has developed an ultrasonic transducer for gesture recognition applications that combines the advantages of the MEMS world with the needs of modern technology users. 

MEMS Technologies for Vehicle Environment Detection#

Jörg Amelung (Active Micromechanical Systems)

© Shutterstock

Autonomous vehicles are one of the most promising market segments of the future. In this context, sensor systems are indispensable for detecting obstacles, such as other vehicles or pedestrians, in the vehicle's environment. Such systems must be safe, robust, compact and cost-effective in order to cover the entire market segment if possible. Current environmental sensors are mostly based on traditional electronic components. 

This webinar will highlight the potential of microsystems for innovation in autonomous vehicles. One application area is LiDAR (Light Detection And Ranging), the future technology for measuring the distance to an object by illuminating that object with laser light, which is used to precisely digitize the environment and safely navigate vehicles in that environment. Currently deployed LiDAR systems are based on mechanical macroscopic mirror systems and are extremely large and expensive. Solid-state LiDAR (SSL) systems are expected to lead to significant cost reductions; based on microsystems, they are smaller, less expensive and more robust than purely mechanical LiDARs.

Smart Systems for Medical and Health#

Dr. Michael Scholles (Project Hub MEOS)

Health is a valuable commodity - an important field of application for Fraunhofer IPMS photonic microsystems is therefore technologies for improved prevention, diagnostics and therapy in the medical field. After all, life expectancy is increasing worldwide and with it the number of chronic diseases. Health awareness is also growing and the need for innovative prevention and diagnostics is increasing. MEMS technologies can be used in preventive medicine, for example to detect ingredients in food or to diagnose diseases at an early stage thanks to the latest visual imaging techniques. In addition, micromechanical components enable novel forms of therapy and the targeted dosage of drugs. 

Capacitive Micromachined Ultrasonic Transducer (CMUT) – From Concept to Device#

Marcel Krenkel (Environmental Sensing)

Fraunhofer IPMS brings the concept of CMUT to the market. This time we present the principle, advantages and applications of this technology in a webinar. Marcel Krenkel from our business unit Ultrasonic Components talks about the in-house success story and the development process of CMUT devices from consulting and modeling to manufacturing and characterization.

Further applications and currently ongoing research activities will be shown to highlight upcoming trends and improvement of current MEMS-based ultrasound devices.

Fe- FET - A Memory Device for Maximum Integration#

Konrad Seidel (IoT Components and Systems)

In this webinar, application fields and research topics of FeFET memory technology will be discussed. The first part gives an insight into the switching mechanism and the specifics of HfO2 - based ferroelectric memories. Then, results based on the Fraunhofer IPMS research platform for FeFET memories are discussed. 

Finally, possible integration possibilities of FeFET memories are discussed and advantages and disadvantages are shown.

Automotive LIDAR Technologies#

Dr. Jan Grahmann (Active Micromechanical Systems)

© Shutterstock

In autonomous vehicles, the human is only a passenger. The car steers independently and recognizes obstacles and dangers. To enable the vehicle to recognize its environment, optical sensors replace the driver's eye. A team of researchers at the Fraunhofer Institute for Photonic Microsystems IPMS in Dresden is developing microscanning mirrors (MEMS scanners) that can perceive their surroundings reliably and without interference while being small and integrable.

The vision of safe autonomous driving is thus within reach. LiDAR sensors, which replace the driver's eye, are used to enable the vehicle to recognize its environment. LiDAR stands for Light Detection and Ranging and enables distance measurement between object and vehicle. The principle is based on laser signals that are sent into the environment and whose reflection is analyzed.

Fraunhofer IPMS Micro Mirror Arrays - Versatile Spatial Light Modulation#

Dr. Michael Wagner (Spatial Light Modulators)

The spatial light modulators developed at Fraunhofer IPMS consist of arrays of micromirrors on semiconductor chips, with the number of mirrors varying from a few hundred to several million depending on the application. In most cases, this requires a highly integrated application-specific electronic circuit (ASIC) as the basis for the device architecture to enable individual analog deflection of each micromirror. In addition, Fraunhofer IPMS develops the electronics and software to control the mirror array. Depending on the application, the individual mirrors can be tilted or deflected vertically to create a surface pattern, for example to image defined structures.

High-resolution tilting mirror arrays with up to 2.2 million individual mirrors are used by our customers as highly dynamic programmable masks for optical microlithography in the ultraviolet spectral range. The mirror dimensions are 10 μm or larger. By tilting the micromirrors, the structural information is transferred to a high-resolution photoresist at a high frame rate. Other applications include semiconductor inspection and metrology as well as perspective laser printing, marking and material processing.

The power of Micropump – A big idea in a small package#

Dr. Christine Ruffert (Monolithically Integrated Actuator and Sensor Systems)

Micropumps are increasingly finding their way into wide areas of medical technology. For example, for the production of biopharmaceutical proteins, protein engineering, drug screening and lab-on-a-chip systems. Micropumps are also a key component for point-of-care diagnostics and drug dosing. Compared to conventional pumps, micropumps have a much smaller dimension.

At the same time, new drive solutions are needed to achieve the required pumping performance with small dimensions and low energy consumption.

Li-Fi - Communication at the Speed of Light#

Monika Beck (Wireless Microsystems)

Li-Fi, or Light Fidelity, is a technology for wireless data transmission using light. The principle is simple. A modulator at the transmitter switches a light-emitting diode, or LED for short, on and off very quickly so that the human eye does not perceive it. A photodiode at the receiver picks up the light and converts it into electrical pulses. A prerequisite for this is direct visual contact between the transmitter and receiver.

Compared to other wireless communication standards, Li-Fi offers significant advantages such as fast wireless data transmission, real-time communication, high data security due to the need for line-of-sight, and freedom from interference.