Fraunhofer IPMS Webinars

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Webinar Archive

You can watch webinars from the past online at any time - please follow the link in the blue tile. Further information on technologies or applications as well as contact persons can be found behind the link in the white tile.

No. WEBINAR TITLE MORE INFO
20 300 mm Semiconductor Analytics: XPS/HAXPES Scanning Microprobe click here
19 Managing a High-Mix and Low-Volume MEMS R&D Fab by Applying KPIs click here
18 Manufacturing Process Challenges for MEMS Based Holography SLM Devices click here
17 Multimodal, Modular and Mobile Sensor System for Improved Patient Monitoring click here
16 Development and Fabrication of Leading Edge Thermopile Arrays click here
15 Material development for MRAM and FRAM stacks click here
14 Neuromorphic Computing for Edge AI click here
13 Spatial Light Modulators - Status and Potential for Holography click here
12 Advanced Technology and Hardware for Next Generation Computing click here
11 Optical and Electrical Microsystems for Advanced Biomedical Imaging and Diagnosis click here
10 MEMS Technologies and Applications click here
09 Low Frequency MEMS Ultrasound Transducers click here
08 MEMS Technologies for Vehicle Environment Detection click here
07 Smart Systems for Medical and Health click here
06 Capacitive Micromachined Ultrasonic Transducer (CMUT) – From Concept to Device click here
05 Fe- FET - A Memory Device for Maximum Integration click here
04 Automotive LIDAR Technologies click here
03 Fraunhofer IPMS Micro Mirror Arrays - Versatile Spatial Light Modulation click here
02 The power of Micropump – A big idea in a small package click here
01 Li-Fi - Communication at the Speed of Light click here

300 mm Semiconductor Analytics: XPS/HAXPES Scanning Microprobe

Dr. Jennifer Emara & Dr. Nora Haufe (Fraunhofer IPMS - Advanced Surface Characterization)

X-ray photoelectron spectroscopy (XPS) is a surface sensitive and quantitative technique that probes the chemistry of a material. When the XPS X-ray source impinges a sample, electrons are excited by the photoelectric effect. The energies of the photoelectrons ejected are analyzed to obtain information on chemical state and elemental composition of a sample. With XPS, sample types such as wafers, foils, powders, etc. can be analyzed, in both conductive and insulating form. The technique can be applied to the analysis of oxides, doped materials, catalysts, electrode materials, organics and inorganics, alloys, single and multi-layer thin films, etc. We offer a unique lab-based combination of monochromatic x-ray sources: a soft x-ray source (Aluminium Kα) and a high energy X-ray source (HAXPES using Chromium Kα) for a wider range of analysis needs. In addition, several capabilities such as in-situ temperature measurements, depth profiling, micro-area analysis, and X-ray imaging (for structured or inhomogeneous samples) are possible.  In this 20 minute webinar, the basics of XPS and capabilities of our new XPS/HAXPES instrument will be introduced. 

Managing a High-Mix and Low-Volume MEMS R&D Fab by Applying KPIs

Thomas Zarbock (Fraunhofer IPMS)

Fraunhofer IPMS offers its customers the complete service for the development of micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) on 200 mm wafers. The technological development and support of MEMS technologies, from individual processes to technology modules to complete technology, as well as the process-related support of the systems in the clean room, is provided by our team of over 90 engineers, operators and technicians. On customer request, we take over the pilot production after the successful development or support a technology transfer, whereby the Fraunhofer IPMS covers the technological maturity levels (TRL) from three to eight. 

Manufacturing Process Challenges for MEMS Based Holography SLM Devices

Dr. Christoph Hohle (Fraunhofer IPMS)

The spatial light modulators developed at Fraunhofer IPMS consist of arrays of micromirrors on semiconductor chips, whereby the number of mirrors varies depending on the application, from a few hundred to several millions. In most cases this demands a highly integrated application specific electronic circuit (ASIC) as basis for the component architecture in order to enable an individual analog deflection of each micromirror. In addition, Fraunhofer IPMS develops electronics and software for mirror array control. The individual mirrors can be tilted or vertically deflected depending on the application, so that a surface pattern is created, for example to project defined structures. High resolution tilting mirror arrays with up to 2.2 million individual mirrors are used by our customers as highly dynamic programmable masks for optical micro-lithography in the ultraviolet spectral range. The mirror dimensions are 10 μm or larger. By tilting the micromirrors, structural information is transferred to a high resolution photo resist at high frame rates. Further fields of application are semiconductor inspection and measurement technology, and prospectively laser printing, marking and material processing. 

Multimodal, Modular and Mobile Sensor System for Improved Patient Monitoring

Dr. Michael Scholles (Fraunhofer Center MEOS) & Dr. Christian Münzenmayer (Fraunhofer IIS)

Analysis by miniaturized chemical sensing systems with a MEMS based ion mobility spectrometer as core component will lead to fast screening methods. Optical sensors for mobile Point-of-Care diagnostics make use of integrated optical devices like micro ring resonators with functionalized surfaces. Docking of specific antibodies on those surfaces will change the optical properties of the devices which can be used for detection with high sensitivity and high throughput. Besides development of components and systems, the design of the surfaces itself as well as surface characterization for optimization of analysis are part of the work. 

Development and Fabrication of Leading Edge Thermopile Arrays

Thomas Zarbock (Fraunhofer IPMS) & Dr. Jörg Schieferdecker (Heimann Sensor GmbH)

In cooperation, the thermopile arrays are being iteratively developed and manufactured at IPMS. The three partners, consisting of Heimann Sensor as the product developer, XFAB as the CMOS supplier and the IPMS as the technology partner for the back-end area, are currently working on a project that will lead to a further improvement in pixel size and, as a direct consequence, to a higher pixel density while maintaining the same array size, thus optimizing the resolution. The IPMS is primarily responsible for the hard mask, the isolation structures and the absorber structures and transfers these components for final processing to Heimann Sensor for the realization of pixel arrays with resolutions up to 120x84. The fabrication of existing component generations takes place continuously. 

Material development for MRAM and FRAM stacks

Dr. Lukas Gerlich & Konrad Seidel (Fraunhofer IPMS - Center Nanoelectronic Technologies)

Today, data is the lifeblood disrupting many industries. The vast majority of this data is stored in the form of non-volatile magnetic bits in hard disk drives. This technology was developed more than half a century ago and has reached fundamental scaling limits that prevent further increases in storage capacity. New approaches are needed.

In the webinar, FRAM (Ferroelectric Random Access Memory) and MRAM (Magnetoresistive Random Access Memory) will be presented as two promising concepts for future ultra-low power memory technologies. Special attention will be paid to material development and fabrication on state-of-the-art industrial equipment for 300 mm wafers. 

Neuromorphic Computing for Edge AI

Dr. Thomas Kämpfe (Fraunhofer IPMS)

Neuromorphic Computing Technology is a brain-inspired sensing and processing hardware for more efficient and adaptive computing. It promises energy-efficient implementation of human cognition, such as interpretation and autonomous adaptation. Although the communication pathways in the brain and other neural systems cannot be directly translated into electronic circuits, these mathematical models provide the basis for the implementation. Various hardware realizations are currently discussed such as:  mixed-signal analog/digital CMOS circuits, asynchronous event-based communication and processing schemes as well as memristive, phase-change, ferroelectric or spintronic devices, and other nano-technologies. In this tutorial we will introduce these realizations and discuss merits and challenges to reach the goal for efficient neuromorphic computing hardware for edge intelligence systems. 

Spatial Light Modulators - Status and Potential for Holography

Bernard Kress (Microsoft), Stephen Hamman (Silicon Light Machines), Dr. Michael Wagner (Fraunhofer IPMS) & Stefan Osten (HoloEye) - Moderator: Prof. Harald Schenk Schenk (Fraunhofer IPMS)

Surface light modulators (SLM) play a central role in various application areas such as image projection, wavefront control and light beam control. There are both liquid crystal and MEMS-based modulator types. The webinar will present three different talks by SLM experts covering different complementary SLM variants. Special attention will be given to the perspective of using SLMs for computer-generated holography applications, up to true 3D holographic displays without negative physiological side effects. The introductory lecture will be given by an outstanding and well-known expert in augmented, virtual and mixed reality displays. 

Advanced Technology and Hardware for Next Generation Computing

Dr. Wenke Weinreich, Dr. Benjamin Lilienthal-Uhlig & Fritz Herrmann (Fraunhofer IPMS)

With the Center Nanoelectronic Technologies (CNT), Fraunhofer IPMS conducts applied research on 300 mm wafers for microchip producers, suppliers, equipment manufacturers and R&D partners. We offer the following Ultra Large Scale Integration-level (ULSI) technology developments and services in FEoL and BEoL. In this webinar we provide a short introduction about our services and give an outlook about the research fields of the next years in this area.


Optical and Electrical Microsystems for Advanced Biomedical Imaging and Diagnosis

Dr. Michael Scholles (Project Hub MEOS)

Medical diagnosis relies heavily on innovative biomedical imaging methods. New system concepts combining miniaturized optical MEMS components, such as scanner mirrors and spatial light modulators, with new methods for realizing passive micro-optics enable a variety of different new biomedical products. This webinar will describe the technical realization of these systems and their biomedical applications in more detail.


MEMS Technologies and Applications

Fritz Herrmann (MEMS Technologies)

Fraunhofer IPMS develops products and technologies in the field of micro-electromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) for its customers. Our capabilities cover the entire development arc for MEMS and MOEMS products and technologies. On request, we can undertake pilot and small batch production in-house or support technology transfer to a facility of the customer's choice. We leverage our existing technological capabilities for bulk MEMS, surface MEMS and monolithic integration of CMOS and MEMS/MOEMS. Our work is performed in a state-of-the-art MEMS clean room capable of handling 200-mm wafers. The webinar will provide technical insights into our MEMS technologies and applications for the market.


Low Frequency MEMS Ultrasound Transducers

Dr. Bert Kaiser (Monolithically Integrated Actuator and Sensor Systems)

Human-machine interface technology is becoming increasingly important as ubiquitous technology moves toward requiring full awareness to be decoupled from the user experience. Hearables, which rely on an audio interface without blocking the visual or tactile senses, are a prominent example. Other applications require "silence" for a variety of reasons, while still maintaining the need for convenience and ease of use. Gesture recognition will then play a key role in recognizing user input for various technologies without requiring direct contact or precisely targeted or timed (inter)actions. MEMS-based ultrasonic transducers enable gesture recognition systems that can be produced at a low unit price for high volumes, making them as available as inertial sensors were in the past. With the NEDMUT technology, Fraunhofer IPMS has developed an ultrasonic transducer for gesture recognition applications that combines the advantages of the MEMS world with the needs of modern technology users. 

MEMS Technologies for Vehicle Environment Detection

Jörg Amelung (Active Micromechanical Systems)

© Shutterstock

Autonomous vehicles are one of the most promising market segments of the future. In this context, sensor systems are indispensable for detecting obstacles, such as other vehicles or pedestrians, in the vehicle's environment. Such systems must be safe, robust, compact and cost-effective in order to cover the entire market segment if possible. Current environmental sensors are mostly based on traditional electronic components. 

This webinar will highlight the potential of microsystems for innovation in autonomous vehicles. One application area is LiDAR (Light Detection And Ranging), the future technology for measuring the distance to an object by illuminating that object with laser light, which is used to precisely digitize the environment and safely navigate vehicles in that environment. Currently deployed LiDAR systems are based on mechanical macroscopic mirror systems and are extremely large and expensive. Solid-state LiDAR (SSL) systems are expected to lead to significant cost reductions; based on microsystems, they are smaller, less expensive and more robust than purely mechanical LiDARs.

Smart Systems for Medical and Health

Dr. Michael Scholles (Fraunhofer Center MEOS)

Health is a valuable commodity - an important field of application for Fraunhofer IPMS photonic microsystems is therefore technologies for improved prevention, diagnostics and therapy in the medical field. After all, life expectancy is increasing worldwide and with it the number of chronic diseases. Health awareness is also growing and the need for innovative prevention and diagnostics is increasing. MEMS technologies can be used in preventive medicine, for example to detect ingredients in food or to diagnose diseases at an early stage thanks to the latest visual imaging techniques. In addition, micromechanical components enable novel forms of therapy and the targeted dosage of drugs. 

Capacitive Micromachined Ultrasonic Transducer (CMUT) – From Concept to Device

Marcel Krenkel (Environmental Sensing)

Fraunhofer IPMS brings the concept of CMUT to the market. This time we present the principle, advantages and applications of this technology in a webinar. Marcel Krenkel from our business unit Ultrasonic Components talks about the in-house success story and the development process of CMUT devices from consulting and modeling to manufacturing and characterization.

Further applications and currently ongoing research activities will be shown to highlight upcoming trends and improvement of current MEMS-based ultrasound devices.

Fe- FET - A Memory Device for Maximum Integration

Konrad Seidel (IoT Components and Systems)

In this webinar, application fields and research topics of FeFET memory technology will be discussed. The first part gives an insight into the switching mechanism and the specifics of HfO2 - based ferroelectric memories. Then, results based on the Fraunhofer IPMS research platform for FeFET memories are discussed. 

Finally, possible integration possibilities of FeFET memories are discussed and advantages and disadvantages are shown.

Automotive LIDAR Technologies

Dr. Jan Grahmann (Active Micromechanical Systems)

© Shutterstock

In autonomous vehicles, the human is only a passenger. The car steers independently and recognizes obstacles and dangers. To enable the vehicle to recognize its environment, optical sensors replace the driver's eye. A team of researchers at the Fraunhofer Institute for Photonic Microsystems IPMS in Dresden is developing microscanning mirrors (MEMS scanners) that can perceive their surroundings reliably and without interference while being small and integrable.

The vision of safe autonomous driving is thus within reach. LiDAR sensors, which replace the driver's eye, are used to enable the vehicle to recognize its environment. LiDAR stands for Light Detection and Ranging and enables distance measurement between object and vehicle. The principle is based on laser signals that are sent into the environment and whose reflection is analyzed.

Fraunhofer IPMS Micro Mirror Arrays - Versatile Spatial Light Modulation

Dr. Michael Wagner (Spatial Light Modulators)

The spatial light modulators developed at Fraunhofer IPMS consist of arrays of micromirrors on semiconductor chips, with the number of mirrors varying from a few hundred to several million depending on the application. In most cases, this requires a highly integrated application-specific electronic circuit (ASIC) as the basis for the device architecture to enable individual analog deflection of each micromirror. In addition, Fraunhofer IPMS develops the electronics and software to control the mirror array. Depending on the application, the individual mirrors can be tilted or deflected vertically to create a surface pattern, for example to image defined structures.

High-resolution tilting mirror arrays with up to 2.2 million individual mirrors are used by our customers as highly dynamic programmable masks for optical microlithography in the ultraviolet spectral range. The mirror dimensions are 10 μm or larger. By tilting the micromirrors, the structural information is transferred to a high-resolution photoresist at a high frame rate. Other applications include semiconductor inspection and metrology as well as perspective laser printing, marking and material processing.


The power of Micropump – A big idea in a small package

Dr. Christine Ruffert (Monolithically Integrated Actuator and Sensor Systems)

Micropumps are increasingly finding their way into wide areas of medical technology. For example, for the production of biopharmaceutical proteins, protein engineering, drug screening and lab-on-a-chip systems. Micropumps are also a key component for point-of-care diagnostics and drug dosing. Compared to conventional pumps, micropumps have a much smaller dimension.

At the same time, new drive solutions are needed to achieve the required pumping performance with small dimensions and low energy consumption.

Li-Fi - Communication at the Speed of Light

Monika Beck (Wireless Microsystems)

Li-Fi, or Light Fidelity, is a technology for wireless data transmission using light. The principle is simple. A modulator at the transmitter switches a light-emitting diode, or LED for short, on and off very quickly so that the human eye does not perceive it. A photodiode at the receiver picks up the light and converts it into electrical pulses. A prerequisite for this is direct visual contact between the transmitter and receiver.

Compared to other wireless communication standards, Li-Fi offers significant advantages such as fast wireless data transmission, real-time communication, high data security due to the need for line-of-sight, and freedom from interference.