Estrel Berlin  /  October 28, 2019  -  October 30, 2019


The MST Congress is an outstanding national platform in the field of microelectronics, microsystems and precision engineering. Thanks to its well-established industrial base, Germany has a strong position here: from MEMS and chip manufacturers to system houses offering complete solutions and a broad spectrum of sensors and microsystems. Fraunhofer IPMS is represented at the congress through a variety of technical presentations. Also at the joint booth of FMD we will show case a miniaturized optical spectrometer allowing for mobile analysis of versatile substances.


Tuesday, Oct 29, 2019, 11:30-11:50 Uhr, Room: V 

Dr. Heinrich Grüger - Integration of complex miniaturized optical systems by place and bend assembly”

Tuesday, Oct 29, 2019, 17:15-17:40 Uhr, Room: Estrel-Saal A

Dr. Andreas Neudert – „MEMS Aktuator-Array mit Kammantrieb und verbesserter Linearität”

Wednesday, Oct 30, 2019, 14:10-14:30 Uhr, Room: Estrel-Saal B

Dr. Alexander Graf – “Ionenmobilitätsspektrometer mit FAIMS-Filter in MEMS-Technologie” 

Wednesday, Oct 30, 14:10-14:30 Uhr, Room: V

Dr. Malte Czernohorsky - “Antiferroelektrische, eingebettete Dünnschichtkondensatoren als Energiespeicher für autarke Sensorelemente”

Wednesday, Oct 30, 15:30-15:50 Uhr, Room: Estrel-Saal A

Dr. Michael Scholles - “Optische Mikrosysteme zur verbesserten Bildgebung in der Biomedizin”

Wednesday, Oct 30, 16:10-16:30 Uhr, Room: Estrel-Saal A 

Barbara Spitz – “Audio-Transducer for In-Ear-Applications based on CMOS-compatible electrostatic actuators”

Wednesday, Oct 30, 15:50-16:10 Uhr, Room: Estrel-Saal B

Michael Stolz – „Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen”