All scientific publications are centrally documented in the database "Fraunhofer-Publica". On this page you will find all publications of our institute sorted by year.
Fraunhofer Publica collects and publishes the publications according to the Open Access strategy. Open Access is the open access to scientific publications and increases the visibility of research results and thus the innovation activities of Fraunhofer.
| Jahr Year | Titel/Autor:in Title/Author | Publikationstyp Publication Type |
|---|---|---|
| 2021 | Process influences on the microstructure of BEoL integrated ferroelectric hafnium zirconium oxide Lederer, M.; Lehninger, D.; Abdulazhanov, S.; Reck, A.; Olivo, R.; Kämpfe, T.; Seidel, K. |
Konferenzbeitrag |
| 2021 | Electric field-induced crystallization of ferroelectric hafnium zirconium oxide Lederer, M.; Abdulazhanov, S.; Olivo, R.; Lehninger, D.; Kämpfe, T.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | On the Origin of Wake-Up and Antiferroelectric-Like Behavior in Ferroelectric Hafnium Oxide Lederer, M.; Olivo, R.; Lehninger, D.; Abdulazhanov, S.; Kämpfe, T.; Kirbach, S.; Mart, C.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | Tunability of Ferroelectric Hafnium Zirconium Oxide for Varactor Applications Abdulazhanov, S.; Lederer, M.; Lehninger, D.; Mart, C.; Ali, T.; Wang, D.; Olivo, R.; Emara, J.; Kämpfe, T.; Gerlach, G. |
Zeitschriftenaufsatz |
| 2021 | The effect of temperature on the ferroelectric properties of Hafnium Zirconium Oxide MFM thin-film varactors Abdulazhanov, S.; Lederer, M.; Lehninger, D.; Ali, T.; Olivo, R.; Kämpfe, T. |
Konferenzbeitrag |
| 2021 | Influence of antiferroelectric-like behavior on tuning properties of ferroelectric HZO-based varactors Abdulazhanov, S.; Lederer, M.; Lehninger, D.; Ali, T.; Emara, J.; Olivo, R.; Kämpfe, T. |
Zeitschriftenaufsatz |
| 2021 | RF-Characterization of HZO Thin Film Varactors Abdulazhanov, S.; Le, Q.H.; Huynh, D.K.; Wang, D.; Lederer, M.; Olivo, R.; Mertens, K.; Emara, J.; Kämpfe, T.; Gerlach, G. |
Zeitschriftenaufsatz |
| 2021 | Spatial Light Modulator-Based Architecture to Implement a Super-Resolved Compressive Instrument for Earth Observation Raimondi, V.; Acampora, L.; Amato, G.; Baldi, M.; Berndt, D.; Dauderstädt, U.A.; Bianchi, A.; Bianchi, T.; Borrelli, D.; Colcelli, V.; Corti, C.; Corti, F.; Corti, M.; Cox, N.; Dauderstädt, U.A.; Dürr, P.; Francés González, S.; Frosini, P.; Guzzi, D.; Huntingford, J.; Kunze, D.; Labate, D.; Lamquin, N.; Lastri, C.; Magli, E.; Nardino, V.; Pache, C.; Palombi, L.; Pettinelli, I.; Pilato, G.; Pollini, A.; Rossini, L.; Suetta, E.; Taricco, D.; Valsesia, D.; Wagner, M. |
Konferenzbeitrag |
| 2021 | Atomic layer deposition of textured Li4Ti5O12: A high-power and long life-cycle life anode for lithium-ion thin-film batteries Speulmanns, J.; Kia, A.M.; Bönhardt, S.; Weinreich, W.; Adelhelm, P. |
Zeitschriftenaufsatz |
| 2021 | Nonlinearity of balanced mems loudspeakers: Optical experiments and numerical modeling using time-harmonic signals Melnikov, A.; Michael, S.; Wall, F.; Kaiser, B.; Mrosk, A.; Schuffenhauer, D.; Monsalve, J.; Sergiu, L.; Schenk, H.A.G.; Ehrig, L.; Conrad, H.; Ahnert, M.; Schenk, H. |
Konferenzbeitrag |
| 2021 | 1T1C FeRAM Memory Array Based on Ferroelectric HZO With Capacitor Under Bitline Okuno, J.; Kunihiro, T.; Konishi, K.; Materano, M.; Ali, T.; Kuehnel, K.; Seidel, K.; Mikolajick, T.; Schroeder, U.; Tsukamoto, M.; Umebayashi, T. |
Zeitschriftenaufsatz |
| 2021 | Ferroelectric Field Effect Transistors as a Synapse for Neuromorphic Application Lederer, M.; Kämpfe, T.; Ali, T.; Müller, F.; Olivo, R.; Hoffmann, R.; Laleni, N.; Seidel, K. |
Zeitschriftenaufsatz |
| 2021 | Enabling Ferroelectric Memories in BEoL-towards advanced neuromorphic computing architectures Lehninger, D.; Lederer, M.; Ali, T.; Kämpfe, T.; Mertens, K.; Seidel, K. |
Konferenzbeitrag |
| 2021 | Substrate-dependent differences in ferroelectric behavior and phase diagram of Si-doped hafnium oxide Lederer, M.; Mertens, K.; Olivo, R.; Kühnel, K.; Lehninger, D.; Ali, T.; Kämpfe, T.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | Impact of the Nonlinear Dielectric Hysteresis Properties of a Charge Trap Layer in a Novel Hybrid High-Speed and Low-Power Ferroelectric or Antiferroelectric HSO/HZO Boosted Charge Trap Memory Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kuhnel, K.; Lehninger, D.; Muller, F.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kampfe, T.; Muller, J.; Seidel, K.; Houdt, J. Van; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | High-endurance and low-voltage operation of 1T1C FeRAM arrays for nonvolatile memory application Okuno, J.; Kunihiro, T.; Konishi, K.; Maemura, H.; Shuto, Y.; Sugaya, F.; Materano, M.; Ali, T.; Lederer, M.; Kuehnel, K.; Seidel, K.; Schroeder, U.; Mikolajick, T.; Tsukamoto, M.; Umebayashi, T. |
Konferenzbeitrag |
| 2021 | A FeFET with a novel MFMFIS gate stack: Towards energy-efficient and ultrafast NVMs for neuromorphic computing Ali, T.; Mertens, K.; Kühnel, K.; Rudolph, M.; Oehler, S.; Lehninger, D.; Müller, F.; Revello, R.; Hoffmann, R.; Zimmermann, K.; Kämpfe, T.; Czernohorsky, M.; Seidel, K.; Houdt, J. van; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | A Fully Integrated Ferroelectric Thin-Film-Transistor - Influence of Device Scaling on Threshold Voltage Compensation in Displays Lehninger, D.; Ellinger, M.; Ali, T.; Li, S.; Mertens, K.; Lederer, M.; Olivio, R.; Kampfe, T.; Hanisch, N.; Biedermann, K.; Rudolph, M.; Brackmann, V.; Sanctis, C.; Jank, M.; Seidel, K. |
Zeitschriftenaufsatz |
| 2021 | Aging in Ferroelectric Si-Doped Hafnium Oxide Thin Films Mart, C.; Kohlenbach, N.-D.; Kühnel, K.; Eßlinger, S.; Czernohorsky, M.; Ali, T.; Weinreich, W.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | Microstructural implications for neuromorphic synapses based on ferroelectric hafnium oxide Müller, F.; Lederer, M.; Olivo, R.; Reck, A.; Ali, T.; Seidel, K.; Kämpfe, T. |
Konferenzbeitrag |
| 2021 | Influence of microstructure on the variability and current percolation paths in ferroelectric hafnium oxide based neuromorphic FeFET synapses Lederer, M.; Müller, F.; Varanasi, A.; Olivio, R.; Mertens, K.; Lehninger, D.; Raffel, Y.; Hoffmann, R.; Ali, T.; Seidel, K.; Kämpfe, T.; Eng, L.M. |
Konferenzbeitrag |
| 2021 | Room temperature PVD TiN to improve the ferroelectric properties of HZO films in the BEoL Lehninger, D.; Mertens, K.; Gerlich, L.; Lederer, M.; Ali, T.; Seidel, K. |
Zeitschriftenaufsatz |
| 2021 | Optimizing Ferroelectric and Interface Layers in HZO-Based FTJs for Neuromorphic Applications Sünbül, A.; Ali, T.; Mertens, K.; Revello, R.; Lehninger, D.; Müller, F.; Lederer, M.; Kühnel, K.; Rudolph, M.; Oehler, S.; Hoffmann, R.; Zimmermann, K.; Biedermann, K.; Schramm, P.; Czernohorsky, M.; Seidel, K.; Kämpfe, T.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | Current percolation path impacting switching behavior of ferroelectric FETs Müller, F.; Lederer, M.; Olivo, R.; Ali, T.; Hoffmann, R.; Mulaosmanovic, H.; Beyer, S.; Dünkel, S.; Müller, J.; Müller, S.; Seidel, K.; Gerlach, G. |
Konferenzbeitrag |
| 2021 | Impact of the interface layer on the cycling behaviour and retention of ferroelectric hafnium oxide Lederer, M.; Mertens, K.; Kia, A.M.; Emara, J.; Olivo, R.; Raffel, Y.; Lehninger, D.; Ali, T.; Kühnel, K.; Seidel, K.; Kämpfe, T.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | Ferroelektrischer Dünnschichttransistor und Verfahren zum Herstellen eines ferroelektrischen Dünnschichttransistors Ali, Tarek Nadi Ismail; Polakowski, Patrick; Seidel, Konrad |
Patent |
| 2021 | Influence of Annealing Temperature on the Structural and Electrical Properties of Si-Doped Ferroelectric Hafnium Oxide Lederer, M.; Bagul, P.; Lehninger, D.; Mertens, K.; Reck, A.; Olivo, R.; Kämpfe, T.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | Impact of the SiO2 interface layer on the crystallographic texture of ferroelectric hafnium oxide Lederer, M.; Reck, A.; Mertens, K.; Olivo, R.; Bagul, P.; Kia, A.; Volkmann, B.; Kämpfe, T.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | SmartSpectrometer - Embedded Optical Spectroscopy for Applications in Agriculture and Industry Krause, Julius; Grüger, Heinrich; Gebauer, Lucie; Zheng, Xiaorong; Knobbe, Jens; Pügner, Tino; Kicherer, Anna; Gruna, Robin; Längle, Thomas; Beyerer, Jürgen |
Zeitschriftenaufsatz |
| 2021 | Kinetics of the Light and Elevated Temperature Induced Degradation and Regeneration of Quasi-Monocrystalline Silicon Solar Cells Wehmeier, N.; Fischer, G.; Herlufsen, S.; Wolny, F.; Wagner, M.; Bothe, K.; Müller, M. |
Zeitschriftenaufsatz |
| 2021 | A 61-GHz RFID frontend with SiGe transceiver MMIC and SIW coupling network Funke, Dominic A.; Hansen, Steffen; Bredendiek, Christian; Grenter, Thorben; Bögel, Gerd vom; Harutyunyan, Armen; Fiedler, Raik; Heinig, Andreas; Pohl, Nils |
Konferenzbeitrag |
| 2021 | Spectroscopic analysis of ultra-thin TiN as a diffusion barrier for lithium-ion batteries by ToF-SIMS, XPS, and EELS Kia, A.M.; Speulmanns, J.; Bönhardt, S.; Emara, J.; Kühnel, K.; Haufe, N.; Weinreich, W. |
Zeitschriftenaufsatz |
| 2021 | Multi‐Level Switching and Reversible Current Driven Domain‐Wall Motion in Single CoFeB/MgO/CoFeB‐Based Perpendicular Magnetic Tunnel Junctions Lv, H.; Fidalgo, J.; Silva, A.V.; Leitao, D.C.; Kämpfe, T.; Langer, J.; Wrona, J.; Ocker, B.; Freitas, P.P.; Cardoso, S. |
Zeitschriftenaufsatz |
| 2021 | Thermo Optical Phase Shifter with Low Thermal Crosstalk for SOI Strip Waveguide Sabouri, S.; Mendoza Velasco, L.A.; Catuneanu, M.; Namdari, M.; Jamshidi, K. |
Zeitschriftenaufsatz |
| 2021 | Stable, Low Power and Bit-Interleaving Aware SRAM Memory for Multi-Core Processing Elements Yadav, N.; Kim, Y.; Li, S.; Choi, K.K. |
Zeitschriftenaufsatz |
| 2021 | Ferroelectric and antiferroelectric Hf/Zr oxide films: Past, present and future Triyoso, D.H.; Clark, R.D.; Weinreich, W.; Mart, C.; Kämpfe, T.; Consiglio, S.; Mukundan, V.; Diebold, A.C.; Tapily, K.; Wajda, C.; Leusink, G. |
Konferenzbeitrag |
| 2021 | Balanced electrostatic all-silicon MEMS speakers Schenk, H.A.G.; Ehrig, L.; Wall, F.; Kaiser, B.; Stolz, M.; Langa, S.; Schuffenhauer, D.; Monsalve Guaracao, J.M.; Melnikov, A.; Conrad, H. |
Konferenzbeitrag |
| 2021 | Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers Monsalve, J.M.; Melnikov, A.; Kaiser, B.; Schuffenhauer, D.; Stolz, M.; Ehrig, L.; Schenk, H.A.G.; Conrad, H.; Schenk, H. |
Zeitschriftenaufsatz |
| 2021 | MEMS mit hohem Aspektverhältnis Langa, Sergiu; Conrad, Holger; Kaiser, Bert |
Patent |
| 2021 | MEMS component, assembly comprising the MEMS component and method for operating the MEMS component Kaiser, Bert; Monsalve Guaracao, Jorge Mario; Conrad, Holger |
Patent |
| 2021 | Mikroelektromechanischer Antrieb zum Bewegen von Objekten Shashank, Shashank; Narimani, Keyvan; Gaudet, Matthieu; Kaiser, Bert; Conrad, Holger |
Patent |
| 2021 | Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films Mart, C.; Kämpfe, T.; Kühnel, K.; Czernohorsky, M.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M. |
Zeitschriftenaufsatz |
| 2021 | Doping concentration dependent piezoelectric behavior of Si:HfO2 thin-films Kirbach, S.; Lederer, M.; Eßlinger, S.; Mart, C.; Czernohorsky, M.; Weinreich, W.; Wallmersperger, T. |
Zeitschriftenaufsatz |
| 2021 | Analog Spatial Light Modulators Based on Micromirror Arrays Dauderstädt, U.; Dürr, P.; Gehner, A.; Wagner, M.; Schenk, H. |
Zeitschriftenaufsatz |
| 2021 | Validation of Computational Procedures for the Progressive Collapse Analysis of Reinforced Concrete Structures Dmitriev, A.; Lalin, V.; Melnikov, A. |
Konferenzbeitrag |
| 2021 | Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators Hohle, C.; Döring, S.; Friedrichs, M.; Gehner, A.; Rudloff, D.; Schulze, M.; Stübner, R.; Trenkler, D. |
Konferenzbeitrag |
| 2021 | MEMS-Aktuator-Element und MEMS-Aktuator-Array mit einer Mehrzahl von MEMS-Aktuator-Elementen Dürr, Peter; Neudert, Andreas; Felsberg, Linda |
Patent |
| 2021 | MEMS-Aktuator und MEMS-Aktuator-Array mit einer Mehrzahl von MEMS-Aktuatoren Dürr, Peter |
Patent |
| 2021 | 240-GHz Reflectometer-Based Dielectric Sensor with Integrated Transducers in a 130-nm SiGe BiCMOS Technology Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D. |
Zeitschriftenaufsatz |
| 2021 | WS2 and MoS2 counter electrode materials for dye‐sensitized solar cells Rashidi, S.; Rashidi, S.; Heydari, R.K.; Esmaeili, S.; Tran, N.; Thangi, D.; Wei, W. |
Zeitschriftenaufsatz |
| 2021 | Mikromechanischer Strahlungsdetektor, mikromechanisches Spektrometer und Verfahren zur Strahlungsmessung Mart, Clemens; Kämpfe, Thomas; Eßlinger, Sophia |
Patent |
| 2021 | Multipath lens for eye-safe optical wireless communications Kirrbach, R.; Schneider, T.; Faulwaßer, M.; Zielant, K. |
Zeitschriftenaufsatz |
| 2021 | Drahtloser Datenbus Schneider, Tobias; Kirrbach, René; Faulwaßer, Michael; Noack, Alexander |
Patent |
| 2021 | Method for controlling a driver circuit, driver circuit, system comprising a driver circuit and method for manufacturing an integrated circuit Fiedler, Raik; Pietzsch, Marcus |
Patent |
| 2021 | Concept and first results on a miniaturized IMS chip with integrated DMS ion filter and detector Graf, A.; Funke, N.; Hild, Olaf R. |
Poster |
| 2021 | XPS Diffusion analysis of Ta(N)/Ru Diffusion Barriers for Cobalt Interconnects Wehring, B.; Gerlich, L.; Uhlig, B. |
Konferenzbeitrag |
| 2021 | Prozesskette zur Faltmontage für miniaturisierte komplexe Optiksysteme Grüger, H.; Sdrenka, S.; Stein, K.; Sabiha, M.; Schulz, M.; Ziegmann, G. |
Vortrag |
| 2021 | Exploiting FeFET Switching Stochasticity for Low-Power Reconfigurable Physical Unclonable Function Guo, X.; Ma, X.; Müller, F.; Olivo, R.; Wu, J.; Ni, K.; Kämpfe, T.; Liu, Y.; Yang, H.; Li, X. |
Konferenzbeitrag |
| 2021 | Silver- and Silver-Hydrogen-Related Defects in Silicon Gwozdz, K.; Kolkovsky, V. |
Zeitschriftenaufsatz |
| 2021 | A 61-GHz Rectifier Using Internal Voltage Cancellation and Body-Biasing Techniques in 22-nm FDSOI Harutyunyan, A.; Landwehr, M. |
Zeitschriftenaufsatz |
| 2021 | Konfiguration von komplexen Transpondersystemen mittels modularer Firmware Heinig, Andreas; Weder, Andreas |
Patent |
| 2021 | Optimierte Datenübertragung für UHF-Transponder Heinig, Andreas; Weder, Andreas |
Patent |
| 2021 | Vakuumvorrichtung Heinig, Andreas; Weder, Andreas |
Patent |
| 2021 | Comparison of Analog and Noise Performance between Buried Channel versus Surface Devices in HKMG I/O Devices Pirro, L.; Jayakumar, A.; Zimmerhackl, O.; Lipp, D.; Illgen, R.; Muehlhoff, A.; Pfuetzner, R.; Zaka, A.; Otto, M.; Hoentschel, J.; Raffel, Y.; Seidel, K.; Olivo, R. |
Konferenzbeitrag |
| 2021 | FeFET Multi-Bit Content-Addressable Memories for In-Memory Nearest Neighbor Search Kazemi, A.; Sharifi, M.M.; Laguna, A.F.B.; Müller, F.; Yin, X.; Kämpfe, T.; Niemier, M.; Hu, X.S. |
Zeitschriftenaufsatz |
| 2021 | Empirical Large-Signal Modeling of mm-Wave FDSOI CMOS Based on Angelov Model Le, Q.H.; Huynh, D.K.; Lehmann, S.; Zhao, Z.; Kämpfe, T.; Rudolph, M. |
Zeitschriftenaufsatz |
| 2021 | Coulomb-actuated microbeams revisited: Experimental and numerical modal decomposition of the saddle-node bifurcation Melnikov, A.; Schenk, H.A.G.; Monsalve, J.M.; Wall, F.; Stolz, M.; Mrosk, A.; Langa, S.; Kaiser, B. |
Zeitschriftenaufsatz |
| 2021 | MEMS component with in-plane movable element and method for operating same Kaiser, Bert |
Patent |
| 2021 | All-silicon ultrasonic recognition of the environment Kaiser, Bert |
Vortrag |
| 2021 | Two-Photon-Lithography Substrate Reflection and Absorption Compensation for Additive Manufacturing of Metamaterials on MEMS Schweiger, S.; Koch, S.G.; Schenk, H. |
Konferenzbeitrag |
| 2021 | Capacitive Micromachined Ultrasonic Transducers (CMUT) Utilized as Tactile Sensors Köble, S.; Krenkel, M.; Koch, S.G.; Urbahn, C. |
Konferenzbeitrag |
| 2021 | Empowering Robots for Multimodal Tactile Gripping using Capacitive Micromachined Ultrasonic Transducers Koch, Sandro G.; Völz, Uwe; Lange, Nicolas; Köble, Sören; Schubert, F.; Richter, F.; Poongodan, P.K .; Vanselow, F.; Urbahn, C. |
Konferenzbeitrag |
| 2021 | Hydrogen-Related Defects in Insulators Kolkovsky, V. |
Zeitschriftenaufsatz |
| 2021 | Sensor mit einer Festkörper-Schichtstruktur und Verfahren zur Herstellung eines Sensors Kurth, Eberhard; Kunath, Christian |
Patent |
| 2021 | Bewegbares Piezoelement und Verfahren zum Herstellen eines bewegbaren Piezoelements Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad |
Patent |
| 2021 | Widerstandsnetzwerk Lederer, Maximilian; Kämpfe, Thomas |
Patent |
| 2021 | Piezoelektrisches Element und Verfahren zum Herstellen eines piezoelektrischen Elements Kämpfe, Thomas |
Patent |
| 2021 | Investigation of High Electric Field Degradation Effects on Nanoscopic Electrostatic Drive Actuators (NED) Mahanta, Trideep |
Master Thesis |
| 2021 | Smart System for Early Detection of Severe COVID-19 Cases Scholles, M. |
Konferenzbeitrag |
| 2021 | Optical microsystems for advanced imaging in biomedicine Scholles, Michael |
Abstract |
| 2021 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2020/2021 | Jahresbericht |
Fraunhofer Institute for Photonic Microsystems