Alle wissenschaflichen Veröffentlichungen werden zentral in der Datenbank "Fraunhofer-Publica" dokumentiert. Sie finden auf dieser Seite alle Veröffentlichungen unseres Insititutes geordnet nach Jahrgang.
Die Fraunhofer Publica sammelt und veröffentlicht die Publikationen nach der Open Access-Strategie. Open Access ist der offene Zugang zu wissenschaftlichen Publikationen und erhöht die Sichtbarkeit von Forschungsergebnissen und damit die Innovationsaktivitäten von Fraunhofer.
| Jahr Year | Titel/Autor:in Title/Author | Publikationstyp Publication Type |
|---|---|---|
| 2023 | Das Fraunhofer-Modell: Effektiver Transfer von Ideen und Innovationen in die Wirtschaft durch erfolgsabhängige Förderkonzepte Ammer, Simon; Maskos, Michael; Kiesewalter, Stefan; Pantzer, Jonas; Walther, Mario |
Aufsatz in Buch Book Article |
| 2023 | Ferroelectric Content-Addressable Memory Cells with IGZO Channel: Impact of Retention Degradation on the Multibit Operation Sk, Masud Rana; Thunder, Sunanda; Lehninger, David; Raffel, Yannick; Lederer, Maximilian; Jank, Michael; Kämpfe, Thomas; De, Sourav; Chakrabarti, Bhaswar |
Zeitschriftenaufsatz Journal Article |
| 2022 | SEC-Learn: Sensor Edge Cloud for Federated Learning Aichroth, Patrick; Antes, Christoph; Gembaczka, Pierre; Graf, Holger; Johnson, David S.; Jung, Matthias; Kämpfe, Thomas; Kleinberger, Thomas; Köllmer, Thomas; Kuhn, Thomas; Kutter, Christoph; Krüger, Jens; Loroch, Dominik M.; Lukashevich, Hanna; Laleni, Nelli; Zhang, Lei; Leugering, Johannes; Martín Fernández, Rodrigo; Mateu, Loreto; Mojumder, Shaown; Prautsch, Benjamin; Pscheidl, Ferdinand; Roscher, Karsten; Schneickert, Sören; Vanselow, Frank; Wallbott, Paul; Walter, Oliver; Weber, Nico |
Konferenzbeitrag Conference Paper |
| 2022 | Passivation and Electrical Properties of Alumina Layers Deposited by Atomic-Layer Deposition with Different Precursors Kolkovsky, Vladimir; Lange, Nicolas |
Zeitschriftenaufsatz Journal Article |
| 2022 | Raman Spectroscopy as a Key Method to Distinguish the Ferroelectric Orthorhombic Phase in Thin ZrO2-Based Films Materano, M.; Reinig, Peter; Kersch, A.; Popov, M.; Deluca, M.; Mikolajick, T.; Boettger, U.; Schroeder, U. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays Okuno, J.; Yonai, T.; Kunihiro, T.; Konishi, K.; Materano, M.; Ali, Tarek Nadi Ismail; Lederer, Maximilian; Seidel, Konrad; Mikolajick, T.; Schroeder, U.; Tsukamoto, M.; Umebayashi, T. |
Konferenzbeitrag Conference Paper |
| 2022 | Additive manufacturing of a passive, sensor-monitored 16MnCr5 steel gear incorporating a wireless signal transmission system Binder, Maximilian; Stapff, Veronika Andrea; Heinig, Andreas; Schmitt, Matthias; Seidel, Christian; Reinhart, G. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Review on the Microstructure of Ferroelectric Hafnium Oxides Lederer, Maximilian; Lehninger, David; Ali, Tarek Nadi Ismail; Kämpfe, Thomas |
Review |
| 2022 | 300 mm CMOS-compatible fabrication of Ru2Si3 sub-50 nm thin films and characterization Hertel, Johannes; Schwinge, Caroline; Gerlich, Lukas; Wagner-Reetz, Maik |
Zeitschriftenaufsatz Journal Article |
| 2022 | A Performance Study of 22nm FDSOI CMOS for Wideband 5G Power Amplifier Applications Le, Quang Huy; Huynh, Dang Khoa; Nayak, Anurag; Kämpfe, Thomas; Rudolph, Matthias |
Konferenzbeitrag Conference Paper |
| 2022 | Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability Ali, Tarek Nadi Ismail; Revello Olivo, Ricardo Orlando; Kerdiles, S.; Lehninger, David; Lederer, Maximilian; De, Sourav; Royet, A.-S.; Sünbül, Ayse; Prabhu, Aditya; Kühnel, Kati; Czernohorsky, Malte; Rudolph, Matthias; Hoffmann, Raik; Charpin-Nicolle; Grenouillet, L.; Kämpfe, Thomas; Seidel, Konrad |
Konferenzbeitrag Conference Paper |
| 2022 | Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films Ali, T.; Lehninger, D.; Lederer, M.; Li, S.; Kühnel, K.; Mart, C.; Mertens, K.; Hoffmann, R.; Olivo, R.; Emara, J.; Biedermann, K.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Reliability of Ferroelectric and Antiferroelectric Si:HfO2 materials in 3D capacitors by TDDB studies Viegas, Alison Erlene; Falidas, Konstantinos Efstathios; Ali, Tarek Nadi Ismail; Kühnel, Kati; Hoffmann, Raik; Mart, C.; Czernohorsky, Malte; Heitmann, J. |
Konferenzbeitrag Conference Paper |
| 2022 | Memory Array Demonstration of fully integrated 1T-1C FeFET concept with separated ferroelectric MFM device in interconnect layer Seidel, Konrad; Lehninger, David; Hoffmann, Raik; Mähne, H.; Ali, Tarek Nadi Ismail; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Bernert, K.; Biedermann, Kati; Thiem, S.; Mertens, Konstantin; Heinig, Andreas; Landwehr, Matthias; Shen, Yukai; Wang, Defu; Kämpfe, Thomas |
Konferenzbeitrag Conference Paper |
| 2022 | Machine Learning Assisted Statistical Variation Analysis of Ferroelectric Transistors: From Experimental Metrology to Predictive Modeling Choe, G.; Ravindran, P.V.; Lu, A.; Hur, J.; Lederer, Maximilian; Reck, André; Lombardo, S.; Afroze, N.; Kacher, J.; Khan, A.I.; Yu, S. |
Konferenzbeitrag Conference Paper |
| 2022 | Fluorite-Structured Ferroelectric and Antiferroelectric Materials: A Gateway of Miniaturized Electronic Devices Al, F.; Ali, Tarek Nadi Ismail; Lehninger, David; Sünbül, Ayse; Viegas, Alison Erlene; Sachdeva, Ridham; Abbas, A.; Czernohorsky, Malte; Seidel, Konrad |
Review |
| 2022 | Experimental Test Setup of an Airwall to Reduce the Convective Heat Loss in Solar Thermal Cavity Receivers Bitterling, Moritz; Bern, Gregor; Fugmann, Hannes; Cohnen, Christopher; Fluri, Tom; Sonnabend, Thomas; Karl, Martin |
Vortrag Presentation |
| 2022 | Fe-Related Defects in Si: Laplace Deep-Level Transient Spectroscopy Studies Gwozdz, K.; Kolkovsky, Vladimir |
Zeitschriftenaufsatz Journal Article |
| 2022 | Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation Schweiger, Severin; Schulze, Tim; Schlipf, Simon; Reinig, Peter; Schenk, Harald |
Zeitschriftenaufsatz Journal Article |
| 2022 | Seebeck effect and Joule heating in CoFeB/MgO/CoFeB-based perpendicular magnetic tunnel junctions with low resistance area product Lv, H.; Fidalgo, J.; Kämpfe, Thomas; Langer, J.; Wrona, J.; Ocker, B.; Freitas, P.P.; Cardoso, S. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Compressive Sensing instrumental concepts for space applications Raimondi, V.; Baldi, M.; Berndt, Dirk; Bianchi, T.; Borque Gallego, G.; Borrelli, D.; Corti, C.; Corti F.; Corti, M.; Dauderstädt, Ulrike; Dürr, Peter; Gonnelli, A.; Francés González, Sara; Guzzi, D.; Kunze, Detlef; Labate, D.; Lamquin, N.; Lastri, C.; Magli, E.; Marzi, E.; Nardino, V.; Pache, C.; Palombi, L.; Pilato G.; Suetta, E.; Valsesia, D.; Wagner, Michael |
Konferenzbeitrag Conference Paper |
| 2022 | Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology Lehninger, David; Mähne, H.; Ali, Tarek Nadi Ismail; Hoffmann, Raik; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Bernert, K.; Kämpfe, Thomas; Biedermann, Kati; Landwehr, Matthias; Heinig, Andreas; Thiem, S.; Mertens, Konstantin; Wang, Defu; Shen, Yukai; Seidel, Konrad |
Konferenzbeitrag Conference Paper |
| 2022 | Bending Resistant Multibit Memristor for Flexible Precision Inference Engine Application Pal, P.; Lee, K.-J.; Thunder, S.; De, Sourav; Huang, P.T.; Kämpfe, Thomas; Wang, Y.H. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers Monsalve, J.M.; Melnikov, A.; Kaiser, B.; Schuffenhauer, D.; Stolz, M.; Ehrig, L.; Schenk, H.A.G.; Conrad, H.; Schenk, H. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Improved Near-infrared Photoresponse of Si-based Schottky Diode by Nanophotonic Structures Wen, Hanying; Augel, Lion; Knobbe, Jens |
Konferenzbeitrag Conference Paper |
| 2022 | Total Internal Reflection Lens for Optical Wireless Receivers Kirrbach, Rene; Schneider, Tobias; Stephan, Mira; Noack, Alexander; Faulwaßer, Michael; Deicke, Frank |
Zeitschriftenaufsatz Journal Article |
| 2022 | Microacoustic Metagratings at Ultra-High Frequencies Fabricated by Two-Photon Lithography Melnikov, Anton; Köble, Sören; Schweiger, Severin; Chiang, Y.K.; Marburg, S.; Powell, D.A. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Reliability Study of 1T1C FeRAM Arrays with Hf0.5Zr0.5O2 Thickness Scaling Okuno, J.; Kunihiro, T.; Konishi, K.; Shuto, Y.; Sugaya, F.; Materano, M.; Ali, Tarek Nadi Ismail; Lederer, Maximilian; Kuehnel, Kati; Seidel, Konrad; Mikolajick, T.; Schroeder, U.; Tsukamoto, M.; Umebayashi, T. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Electrically Actuated Microbeams: An Explicit Calculation of the Coulomb Integral in the Entire Stable and Unstable Regimes Using a Chebyshev-Edgeworth Approach Schenk, H.A.G.; Melnikov, Anton; Wall, Franziska; Gaudet, M.; Stolz, Michael; Schuffenhauer, David; Kaiser, Bert |
Zeitschriftenaufsatz Journal Article |
| 2022 | Histogram formation and noise reduction in biaxial MEMS-based SPAD light detection and ranging systems Burkard, Roman; Ligges, Manuel; Merten, André; Sandner, Thilo; Viga, Reinhard; Grabmaier, Anton |
Zeitschriftenaufsatz Journal Article |
| 2022 | Endurance improvements and defect characterization in ferroelectric FETs through interface fluorination Raffel, Yannick; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Müller, Franz; Hoffmann, Raik; Ali, Tarek Nadi Ismail; Mertens, K.; Pirro, L.; Drescher, M.; Beyer, S.; Kämpfe, Thomas; Seidel, Konrad; Eng, L.M.; Heitmann, J. |
Konferenzbeitrag Conference Paper |
| 2022 | Impact of Stack Structure Control and Ferroelectric Material Optimization in Novel Laminate HSO and HZO MFMIS FeFET Ali, Tarek Nadi Ismail; Mertens, K.; Revello Olivo, Ricardo Orlando; Lehninger, David; Lederer, Maximilian; Müller, Franz; Rudolph, Matthias; Oehler, Sebastian; Kühnel, Kati; Hoffmann, Raik; Schramm, Philipp; Czernohorsky, Malte; Kämpfe, Thomas; Seidel, Konrad |
Konferenzbeitrag Conference Paper |
| 2022 | Impact of Temperature on Reliability of MFIS HZO-based Ferroelectric Tunnel Junctions Sünbül, Ayse; Ali, Tarek Nadi Ismail; Hoffmann, Raik; Revello Olivo, Ricardo Orlando; Raffel, Yannick; Duhan, P.; Lehninger, David; Kühnel, Kati; Rudolph, Matthias; Oehler, Sebastian; Schramm, Philipp; Czernohorsky, Malte; Seidel, Konrad; Kämpfe, Thomas; Eng, L.M. |
Konferenzbeitrag Conference Paper |
| 2022 | MEMS-based confocal laser scanning fluorescence microscopy for tumor demarcation in oncological surgery Reinig, Peter; Dallmann, Hans-Georg; Schwarzenberg, Markus; Ziebarth, Johannes; Knobbe, Jens; Junek, J.; Herbst, R.; Rathert, J.; Gerlach, R.; Blache, Ulrich; Tretbar, Sandy; Fricke, Stephan |
Konferenzbeitrag Conference Paper |
| 2022 | High Power Eye-Safe Optical Wireless Gigabit Link Employing a Freeform Multipath Lens Kirrbach, Rene; Faulwaßer, Michael; Stephan, Mira; Schneider, Tobias; Deicke, Frank |
Zeitschriftenaufsatz Journal Article |
| 2022 | Al2O3-HfO2 mixed high-k dielectrics for MIM decoupling capacitors in the BEOL Falidas, Konstantinos Efstathios; Mertens, Konstantin; Hoffmann, Raik; Czernohorsky, Malte; Heitmann, J. |
Konferenzbeitrag Conference Paper |
| 2022 | Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2 thin film in 3D-integration Lehmkau, R.; Mutschall, D.; Kaiser, A.; Ebermann, M.; Neumann, N.; Czernohorsky, Malte; Neuber, Markus; Hiller, K.; Seiler, J.; Großmann, Toni |
Konferenzbeitrag Conference Paper |
| 2022 | READ-Optimized 28nm HKMG Multibit FeFET Synapses for Inference-Engine Applications De, Sourav; Müller, Franz; Le, H.-H.; Lederer, Maximilian; Raffel, Yannick; Ali, T.; Lu, D.; Kämpfe, Thomas |
Zeitschriftenaufsatz Journal Article |
| 2022 | Optimization of LPCVD phosphorous-doped SiGe thin films for CMOS-compatible thermoelectric applications Schwinge, Caroline; Kühnel, Kati; Emara, Jennifer Salah; Roy, Lisa; Biedermann, Kati; Weinreich, Wenke; Kolodinski, S.; Wiatr, M.; Gerlach, G.; Wagner-Reetz, Maik |
Zeitschriftenaufsatz Journal Article |
| 2022 | RKKY Exchange Bias Mediated Ultrafast All-Optical Switching of a Ferromagnet Chatterjee, J.; Polley, D.; Pattabi, A.; Jang, H.; Salahuddin, S.; Bokor, J. |
Zeitschriftenaufsatz Journal Article |
| 2022 | Squeeze film damping in MEMS loudspeakers: Analysis of a clamped-clamped microbeam Melnikov, Anton; Schenk, H.A.G.; Wall, Franziska; Monsalve, Jorge M.; Ehrig, L.; Stolz, Michael; Mrosk, Andreas; Langa, Sergiu; Kaiser, Bert |
Konferenzbeitrag Conference Paper |
| 2022 | FeFET Multi-Bit Content-Addressable Memories for In-Memory Nearest Neighbor Search Kazemi, A.; Sharifi, M.M.; Laguna, A.F.B.; Müller, F.; Yin, X.; Kämpfe, T.; Niemier, M.; Hu, X.S. |
Zeitschriftenaufsatz Journal Article |
| 2022 | MEMS-based gas analysis for future medical diagnostics Graf, Alexander; Schönfelder, Jessy; Scholles, Michael |
Zeitschriftenaufsatz Journal Article |
| 2022 | Modeling and Fault Detection of Brushless Direct Current Motor by Deep Learning Sensor Data Fusion Suawa, P.; Meisel, Ténia; Jongmanns, Marcel; Huebner, M.; Reichenbach, M. |
Zeitschriftenaufsatz Journal Article |
| 2022 | MEMS Piston Mirror Arrays for Computer Generated Holography Dürr, Peter; Neudert, Andreas; Nitzsche, Mario; Hohle, Christoph; Stolle, H.; Pleikies, J. |
Konferenzbeitrag Conference Paper |
| 2021 | SmartSpectrometer - Embedded Optical Spectroscopy for Applications in Agriculture and Industry Krause, Julius; Grüger, Heinrich; Gebauer, Lucie; Zheng, Xiaorong; Knobbe, Jens; Pügner, Tino; Kicherer, Anna; Gruna, Robin; Längle, Thomas; Beyerer, Jürgen |
Zeitschriftenaufsatz Journal Article |
| 2021 | Determination of the optimal operating parameters for a FAIMS-Chip for the system integration in the human breath and urine analytic Funke, Nils; Graf, Alexander; Schönfelder, Jessy; Hild, Olaf Rüdiger |
Konferenzbeitrag Conference Paper |
| 2021 | Spectroscopic analysis of ultra-thin TiN as a diffusion barrier for lithium-ion batteries by ToF-SIMS, XPS, and EELS Kia, A.M.; Speulmanns, J.; Bönhardt, S.; Emara, J.; Kühnel, K.; Haufe, N.; Weinreich, W. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Multi‐Level Switching and Reversible Current Driven Domain‐Wall Motion in Single CoFeB/MgO/CoFeB‐Based Perpendicular Magnetic Tunnel Junctions Lv, H.; Fidalgo, J.; Silva, A.V.; Leitao, D.C.; Kämpfe, T.; Langer, J.; Wrona, J.; Ocker, B.; Freitas, P.P.; Cardoso, S. |
Zeitschriftenaufsatz Journal Article |
| 2021 | MEMS mit hohem Aspektverhältnis Langa, Sergiu; Conrad, Holger; Kaiser, Bert |
Patent |
| 2021 | Stable, Low Power and Bit-Interleaving Aware SRAM Memory for Multi-Core Processing Elements Yadav, N.; Kim, Y.; Li, S.; Choi, K.K. |
Zeitschriftenaufsatz Journal Article |
| 2021 | MEMS component with in-plane movable element and method for operating same Kaiser, Bert |
Patent |
| 2021 | Investigation of High Electric Field Degradation Effects on Nanoscopic Electrostatic Drive Actuators (NED) Mahanta, Trideep |
Master Thesis |
| 2021 | Balanced electrostatic all-silicon MEMS speakers Schenk, H.A.G.; Ehrig, L.; Wall, F.; Kaiser, B.; Stolz, M.; Langa, S.; Schuffenhauer, D.; Monsalve Guaracao, J.M.; Melnikov, A.; Conrad, H. |
Konferenzbeitrag Conference Paper |
| 2021 | WS2 and MoS2 counter electrode materials for dye‐sensitized solar cells Rashidi, S.; Rashidi, S.; Heydari, R.K.; Esmaeili, S.; Tran, N.; Thangi, D.; Wei, W. |
Zeitschriftenaufsatz Journal Article |
| 2021 | MEMS-Aktuator-Element und MEMS-Aktuator-Array mit einer Mehrzahl von MEMS-Aktuator-Elementen Dürr, Peter; Neudert, Andreas; Felsberg, Linda |
Patent |
| 2021 | Thermo Optical Phase Shifter with Low Thermal Crosstalk for SOI Strip Waveguide Sabouri, S.; Mendoza Velasco, L.A.; Catuneanu, M.; Namdari, M.; Jamshidi, K. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Konfiguration von komplexen Transpondersystemen mittels modularer Firmware Heinig, Andreas; Weder, Andreas |
Patent |
| 2021 | Optimierte Datenübertragung für UHF-Transponder Heinig, Andreas; Weder, Andreas |
Patent |
| 2021 | Two-Photon-Lithography Substrate Reflection and Absorption Compensation for Additive Manufacturing of Metamaterials on MEMS Schweiger, S.; Koch, S.G.; Schenk, H. |
Konferenzbeitrag Conference Paper |
| 2021 | Electric field-induced crystallization of ferroelectric hafnium zirconium oxide Lederer, M.; Abdulazhanov, S.; Olivo, R.; Lehninger, D.; Kämpfe, T.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Impact of the Nonlinear Dielectric Hysteresis Properties of a Charge Trap Layer in a Novel Hybrid High-Speed and Low-Power Ferroelectric or Antiferroelectric HSO/HZO Boosted Charge Trap Memory Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kuhnel, K.; Lehninger, D.; Muller, F.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kampfe, T.; Muller, J.; Seidel, K.; Houdt, J. Van; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Ferroelektrischer Dünnschichttransistor und Verfahren zum Herstellen eines ferroelektrischen Dünnschichttransistors Ali, Tarek Nadi Ismail; Polakowski, Patrick; Seidel, Konrad |
Patent |
| 2021 | Drahtloser Datenbus Schneider, Tobias; Kirrbach, René; Faulwaßer, Michael; Noack, Alexander |
Patent |
| 2021 | Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2020/2021 | Jahresbericht Annual Report |
| 2021 | Kinetics of the Light and Elevated Temperature Induced Degradation and Regeneration of Quasi-Monocrystalline Silicon Solar Cells Wehmeier, N.; Fischer, G.; Herlufsen, S.; Wolny, F.; Wagner, M.; Bothe, K.; Müller, M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Spatial Light Modulator-Based Architecture to Implement a Super-Resolved Compressive Instrument for Earth Observation Raimondi, V.; Acampora, L.; Amato, G.; Baldi, M.; Berndt, D.; Dauderstädt, U.A.; Bianchi, A.; Bianchi, T.; Borrelli, D.; Colcelli, V.; Corti, C.; Corti, F.; Corti, M.; Cox, N.; Dauderstädt, U.A.; Dürr, P.; Francés González, S.; Frosini, P.; Guzzi, D.; Huntingford, J.; Kunze, D.; Labate, D.; Lamquin, N.; Lastri, C.; Magli, E.; Nardino, V.; Pache, C.; Palombi, L.; Pettinelli, I.; Pilato, G.; Pollini, A.; Rossini, L.; Suetta, E.; Taricco, D.; Valsesia, D.; Wagner, M. |
Konferenzbeitrag Conference Paper |
| 2021 | Process influences on the microstructure of BEoL integrated ferroelectric hafnium zirconium oxide Lederer, M.; Lehninger, D.; Abdulazhanov, S.; Reck, A.; Olivo, R.; Kämpfe, T.; Seidel, K. |
Konferenzbeitrag Conference Paper |
| 2021 | 1T1C FeRAM Memory Array Based on Ferroelectric HZO With Capacitor Under Bitline Okuno, J.; Kunihiro, T.; Konishi, K.; Materano, M.; Ali, T.; Kuehnel, K.; Seidel, K.; Mikolajick, T.; Schroeder, U.; Tsukamoto, M.; Umebayashi, T. |
Zeitschriftenaufsatz Journal Article |
| 2021 | High-endurance and low-voltage operation of 1T1C FeRAM arrays for nonvolatile memory application Okuno, J.; Kunihiro, T.; Konishi, K.; Maemura, H.; Shuto, Y.; Sugaya, F.; Materano, M.; Ali, T.; Lederer, M.; Kuehnel, K.; Seidel, K.; Schroeder, U.; Mikolajick, T.; Tsukamoto, M.; Umebayashi, T. |
Konferenzbeitrag Conference Paper |
| 2021 | Substrate-dependent differences in ferroelectric behavior and phase diagram of Si-doped hafnium oxide Lederer, M.; Mertens, K.; Olivo, R.; Kühnel, K.; Lehninger, D.; Ali, T.; Kämpfe, T.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | All-silicon ultrasonic recognition of the environment Kaiser, Bert |
Vortrag Presentation |
| 2021 | 240-GHz Reflectometer-Based Dielectric Sensor with Integrated Transducers in a 130-nm SiGe BiCMOS Technology Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Atomic layer deposition of textured Li4Ti5O12: A high-power and long life-cycle life anode for lithium-ion thin-film batteries Speulmanns, J.; Kia, A.M.; Bönhardt, S.; Weinreich, W.; Adelhelm, P. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films Mart, C.; Kämpfe, T.; Kühnel, K.; Czernohorsky, M.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | The effect of temperature on the ferroelectric properties of Hafnium Zirconium Oxide MFM thin-film varactors Abdulazhanov, S.; Lederer, M.; Lehninger, D.; Ali, T.; Olivo, R.; Kämpfe, T. |
Konferenzbeitrag Conference Paper |
| 2021 | Tunability of Ferroelectric Hafnium Zirconium Oxide for Varactor Applications Abdulazhanov, S.; Lederer, M.; Lehninger, D.; Mart, C.; Ali, T.; Wang, D.; Olivo, R.; Emara, J.; Kämpfe, T.; Gerlach, G. |
Zeitschriftenaufsatz Journal Article |
| 2021 | RF-Characterization of HZO Thin Film Varactors Abdulazhanov, S.; Le, Q.H.; Huynh, D.K.; Wang, D.; Lederer, M.; Olivo, R.; Mertens, K.; Emara, J.; Kämpfe, T.; Gerlach, G. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Microstructural implications for neuromorphic synapses based on ferroelectric hafnium oxide Müller, F.; Lederer, M.; Olivo, R.; Reck, A.; Ali, T.; Seidel, K.; Kämpfe, T. |
Konferenzbeitrag Conference Paper |
| 2021 | Silver- and Silver-Hydrogen-Related Defects in Silicon Gwozdz, K.; Kolkovsky, V. |
Zeitschriftenaufsatz Journal Article |
| 2021 | A 61-GHz Rectifier Using Internal Voltage Cancellation and Body-Biasing Techniques in 22-nm FDSOI Harutyunyan, A.; Landwehr, M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Aging in Ferroelectric Si-Doped Hafnium Oxide Thin Films Mart, C.; Kohlenbach, N.-D.; Kühnel, K.; Eßlinger, S.; Czernohorsky, M.; Ali, T.; Weinreich, W.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Influence of antiferroelectric-like behavior on tuning properties of ferroelectric HZO-based varactors Abdulazhanov, S.; Lederer, M.; Lehninger, D.; Ali, T.; Emara, J.; Olivo, R.; Kämpfe, T. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Piezoelektrisches Element und Verfahren zum Herstellen eines piezoelektrischen Elements Kämpfe, Thomas |
Patent |
| 2021 | Impact of the SiO2 interface layer on the crystallographic texture of ferroelectric hafnium oxide Lederer, M.; Reck, A.; Mertens, K.; Olivo, R.; Bagul, P.; Kia, A.; Volkmann, B.; Kämpfe, T.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | A FeFET with a novel MFMFIS gate stack: Towards energy-efficient and ultrafast NVMs for neuromorphic computing Ali, T.; Mertens, K.; Kühnel, K.; Rudolph, M.; Oehler, S.; Lehninger, D.; Müller, F.; Revello, R.; Hoffmann, R.; Zimmermann, K.; Kämpfe, T.; Czernohorsky, M.; Seidel, K.; Houdt, J. van; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | On the Origin of Wake-Up and Antiferroelectric-Like Behavior in Ferroelectric Hafnium Oxide Lederer, M.; Olivo, R.; Lehninger, D.; Abdulazhanov, S.; Kämpfe, T.; Kirbach, S.; Mart, C.; Seidel, K.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Room temperature PVD TiN to improve the ferroelectric properties of HZO films in the BEoL Lehninger, D.; Mertens, K.; Gerlich, L.; Lederer, M.; Ali, T.; Seidel, K. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Coulomb-actuated microbeams revisited: Experimental and numerical modal decomposition of the saddle-node bifurcation Melnikov, A.; Schenk, H.A.G.; Monsalve, J.M.; Wall, F.; Stolz, M.; Mrosk, A.; Langa, S.; Kaiser, B. |
Zeitschriftenaufsatz Journal Article |
| 2021 | MEMS component, assembly comprising the MEMS component and method for operating the MEMS component Kaiser, Bert; Monsalve Guaracao, Jorge Mario; Conrad, Holger |
Patent |
| 2021 | Concept and first results on a miniaturized IMS chip with integrated DMS ion filter and detector Graf, A.; Funke, N.; Hild, Olaf R. |
Poster |
| 2021 | Empowering Robots for Multimodal Tactile Gripping using Capacitive Micromachined Ultrasonic Transducers Koch, Sandro G.; Völz, Uwe; Lange, Nicolas; Köble, Sören; Schubert, F.; Richter, F.; Poongodan, P.K .; Vanselow, F.; Urbahn, C. |
Konferenzbeitrag Conference Paper |
| 2021 | Smart System for Early Detection of Severe COVID-19 Cases Scholles, M. |
Konferenzbeitrag Conference Paper |
| 2021 | Mikromechanischer Strahlungsdetektor, mikromechanisches Spektrometer und Verfahren zur Strahlungsmessung Mart, Clemens; Kämpfe, Thomas; Eßlinger, Sophia |
Patent |
| 2021 | Nonlinearity of balanced mems loudspeakers: Optical experiments and numerical modeling using time-harmonic signals Melnikov, A.; Michael, S.; Wall, F.; Kaiser, B.; Mrosk, A.; Schuffenhauer, D.; Monsalve, J.; Sergiu, L.; Schenk, H.A.G.; Ehrig, L.; Conrad, H.; Ahnert, M.; Schenk, H. |
Konferenzbeitrag Conference Paper |
| 2021 | Optimizing Ferroelectric and Interface Layers in HZO-Based FTJs for Neuromorphic Applications Sünbül, A.; Ali, T.; Mertens, K.; Revello, R.; Lehninger, D.; Müller, F.; Lederer, M.; Kühnel, K.; Rudolph, M.; Oehler, S.; Hoffmann, R.; Zimmermann, K.; Biedermann, K.; Schramm, P.; Czernohorsky, M.; Seidel, K.; Kämpfe, T.; Eng, L.M. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Sensor mit einer Festkörper-Schichtstruktur und Verfahren zur Herstellung eines Sensors Kurth, Eberhard; Kunath, Christian |
Patent |
| 2021 | Analog Spatial Light Modulators Based on Micromirror Arrays Dauderstädt, U.; Dürr, P.; Gehner, A.; Wagner, M.; Schenk, H. |
Zeitschriftenaufsatz Journal Article |
| 2021 | Capacitive Micromachined Ultrasonic Transducers (CMUT) Utilized as Tactile Sensors Köble, S.; Krenkel, M.; Koch, S.G.; Urbahn, C. |
Konferenzbeitrag Conference Paper |
| 2021 | Validation of Computational Procedures for the Progressive Collapse Analysis of Reinforced Concrete Structures Dmitriev, A.; Lalin, V.; Melnikov, A. |
Konferenzbeitrag Conference Paper |
Fraunhofer-Institut für Photonische Mikrosysteme