Wissenschaftliche Publikationen

Alle wissenschaflichen Veröffentlichungen werden zentral in der Datenbank "Fraunhofer-Publica" dokumentiert. Sie finden auf dieser Seite alle Veröffentlichungen unseres Insititutes geordnet nach Jahrgang.

Die Fraunhofer Publica sammelt und veröffentlicht die Publikationen nach der Open Access-Strategie. Open Access ist der offene Zugang zu wissenschaftlichen Publikationen und erhöht die Sichtbarkeit von Forschungsergebnissen und damit die Innovationsaktivitäten von Fraunhofer.

Fraunhofer IPMS

Publikationen

Fraunhofer IPMS

Patente

Publikationen

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2023 Vorrichtung zur Ermittlung zumindest eines Parameters einer Flüssigkeit
Weder, Andreas
Patent
2023 Elektrostatischer Gegentakt NED-Aktor für Im-Ohr-μ-Lautsprecher
Ruffert, Christine; Schenk, Hermann A.G.; Ehrig, Lutz; Kaiser, Bert; Melnikov, Anton; Langa, Sergiu; Wall, Franziska; Monsalve Guaracao, Jorge Mario; Stolz, Michael; Conrad, Holger; Mrosk, Andreas; Schuffenhauer, David; Schenk, Harald
Poster
2023 Mechanische Systeme mit angepasster Linearität
Shashank, Shashank; Langa, Sergiu
Patent
2023 Fabrication of gate electrodes for scalable quantum computing using CMOS industry compatible e-beam lithography and numerical simulation of the resulting quantum device
Brackmann, Varvara; Neul, Malte; Friedrich, Michael; Langheinrich, Wolfram; Simon, Maik; Muster, Pascal; Pregl, Sebastian; Demmler, Arne; Hanisch, Norbert; Lederer, Maximilian; Zimmermann, Katrin; Klos, Jan; Reichmann, Felix; Yamamoto, Yuji; Wislicenus, Marcus; Dahl, Claus; Schreiber, Lars R.; Bluhm, Hendrik; Lilienthal-Uhlig, Benjamin
Konferenzbeitrag
Conference Paper
2023 CMOS-compatible Si-TiN Schottky SWIR photodetectors enhanced by pyramidal nanostructures
Augel, Lion; Wen, Hanying; Knobbe, Jens
Vortrag
Presentation
2023 Elektronisches Bauteil mit mindestens einer Schicht aus einem ferroelektrischen oder antiferroelektrischen Werkstoff
Lederer, Maximilian; Seidel, Konrad
Patent
2023 Drahtlose Kommunikationsknoten mit Quantenschlüsseln
Noack, Alexander; Deicke, Frank
Patent
2023 Messvorrichtung und Verfahren zur Bestimmung einer Gaskonzentration
Grüger, Heinrich; Knobbe, Jens
Patent
2023 Messsystem, Probenkörper, Elektrodenvorrichtung und Verfahren zum Messen einer Vielzahl von Analyten
Hild, Olaf Rüdiger; Kunath, Christian
Patent
2023 A comprehensive survey of fake news in social networks: Attributes, features, and detection approaches
Kondamudi, Medeswara Rao; Sahoo, Somya Ranjan; Chouhan, Lokesh; Yadav, Nandakishor
Review
2023 SPICE compatible semi-empirical compact model for ferroelectric hysteresis
Lederer, Maximilian; Revello Olivo, Ricardo Orlando; Yadav, Nandakishor; De, Sourav; Seidel, Konrad; Eng, Lukas M.; Kämpfe, Thomas
Zeitschriftenaufsatz
Journal Article
2023 Switching Dynamics and Energy Storage Properties of Fluorite-Structured Materials
Ali, Faizan; Ali, Tarek; Abbas, Akmal; Lehninger, David; Iqbal, Muhammad Faisal; Fadhali, Mohammed M.A.; Shaaban, Ibrahim A.; Czernohorsky, Malte; Seidel, Konrad; Kämpfe, Thomas
Zeitschriftenaufsatz
Journal Article
2023 Point defects in stoichiometric and nonstoichiometric metal oxides for modern microelectronics
Kolkovsky, Vl I.; Stübner, Ronald
Aufsatz in Buch
Book Article
2023 Applications for a broadband NIR spectrometer with scanning mirror device
Grüger, Heinrich; Knobbe, Jens; Kruse, Jens; Schulze, Tim
Konferenzbeitrag
Conference Paper
2023 Das Fraunhofer-Modell: Effektiver Transfer von Ideen und Innovationen in die Wirtschaft durch erfolgsabhängige Förderkonzepte
Ammer, Simon; Maskos, Michael; Kiesewalter, Stefan; Pantzer, Jonas; Walther, Mario
Aufsatz in Buch
Book Article
2023 Hafnium oxide-based Ferroelectric Memories: Are we ready for Application?
Seidel, Konrad; Lehninger, David; Müller, Franz; Raffel, Yannick; Sünbül, Ayse; Revello Olivo, Ricardo Orlando; Hoffmann, Raik; De, Sourav; Kämpfe, Thomas; Lederer, Maximilian
Konferenzbeitrag
Conference Paper
2023 Machine Learning-Assisted Statistical Variation Analysis of Ferroelectric Transistor: From Experimental Metrology to Adaptive Modeling
Choe, Gihun; Ravindran, Prasanna Venkatesan; Hur, Jae H.; Lederer, Maximilian; Reck, André; Khan, Asif Islam; Yu, Shimeng
Zeitschriftenaufsatz
Journal Article
2023 22-nm FDSOI CMOS Noise Modeling and Analysis in mm-Wave Frequency Range
Le, Quang Huy; Huynh, Dang Khoa; Lehmann, Steffen; Zhao, Zhixing; Schwan, Christoph T.; Kämpfe, Thomas; Rudolph, Matthias
Konferenzbeitrag
Conference Paper
2023 X-ray photoelectron spectroscopic investigation of atomic-layer-deposited spinel Li4Ti5O12: Calcination under reducing atmosphere
Kia, Alireza Mohammadian; Speulmanns, Jan Kevin; Emara, Jennifer Salah; Potapov, Pavel L.; Lubk, Axel; Haufe, Nora
Zeitschriftenaufsatz
Journal Article
2023 Ferroelectric Content-Addressable Memory Cells with IGZO Channel: Impact of Retention Degradation on the Multibit Operation
Sk, Masud Rana; Thunder, Sunanda; Lehninger, David; Raffel, Yannick; Lederer, Maximilian; Jank, Michael; Kämpfe, Thomas; De, Sourav; Chakrabarti, Bhaswar
Zeitschriftenaufsatz
Journal Article
2023 ZrAlxOy high-k dielectrics for MIM decoupling capacitors in the BEOL
Falidas, Konstantinos Efstathios; Mertens, Konstantin; Everding, Maximilian; Czernohorsky, Malte; Heitmann, J.
Konferenzbeitrag
Conference Paper
2023 Noise-Robust Machine Learning Models for Predictive Maintenance Applications
Suawa, Priscile Fogou; Halbinger, Anja; Jongmanns, Marcel; Reichenbach, Marc
Zeitschriftenaufsatz
Journal Article
2023 FEM Simulations to optimize a micro mirror array package for a wide operating temperature range
Guru, Sreevidya; Dürr, Peter; Mai, Alexander
Konferenzbeitrag
Conference Paper
2023 Investigation of Recovery Phenomena in Hf0.5Zr0.5O2-Based 1T1C FeRAM
Okuno, Jun; Yonai, Tsubasa; Kunihiro, Takafumi; Shuto, Yusuke; Alcala, Ruben; Lederer, Maximilian; Seidel, Konrad; Mikolajick, Thomas; Schroeder, Uwe Paul; Tsukamoto, Masanori; Umebayashi, Taku
Zeitschriftenaufsatz
Journal Article
2023 Wafer-Level Vacuum Packaged Translatory MEMS Mirror with Large Stroke for compact NIR-FT Spectrometers
Sandner, Thilo; Gaumont, Eric; Graßhoff, Thomas; Rieck, Andreas; Seifert, Tobias; Auböck, Gerald; Grahmann, Jan
Konferenzbeitrag
Conference Paper
2023 1F-1T Array: Current Limiting Transistor Cascoded FeFET Memory Array for Variation Tolerant Vector-Matrix Multiplication Operation
Sk, Masud Rana; Thunder, Sunanda; Müller, Franz; Laleni, Nelli; Raffel, Yannick; Lederer, Maximilian; Pirro, Luca; Chohan, Talha; Hsuen, Jing Hua; Wu, Tian Li; Seidel, Konrad; Kämpfe, Thomas; De, Sourav; Chakrabarti, Bhaswar
Zeitschriftenaufsatz
Journal Article
2023 Improved comb drive design for MEMS piston mirror arrays
Nitzsche, Mario; Dürr, Peter; Neudert, Andreas
Konferenzbeitrag
Conference Paper
2023 Advanced characterization methods for HfO2/ZrO2-based ferroelectrics
Lomenzo, Patrick D.; Celano, Umberto; Kämpfe, Thomas; McMitchell, Sean R.C.
Editorial
2023 A Study on Imprint Behavior of Ferroelectric Hafnium Oxide Caused by High-Temperature Annealing
Sünbül, Ayse; Lehninger, David; Lederer, Maximilian; Mähne, Hannes; Hoffmann, Raik; Bernert, Kerstin; Thiem, Steffen; Schöne, Fred; Döllgast, Moritz; Haufe, Nora; Roy, Lisa; Kämpfe, Thomas; Seidel, Konrad; Eng, Lukas M.
Zeitschriftenaufsatz
Journal Article
2023 Multielectrode Arrays at Wafer-Level for Miniaturized Sensors Applications: Electrochemical Growth of Ag/AgCl Reference Electrodes
Wu, Haosheng; Krause, Robert; Gogoi, Eshanee; Reck, André; Graf, Alexander; Wislicenus, Marcus; Hild, Olaf Rüdiger; Guhl, Conrad
Zeitschriftenaufsatz
Journal Article
2023 Ferroelectric HfO2/ZrO2 Superlattices with Improved Leakage at Bias and Temperature Stress
Lehninger, David; Sünbül, Ayse; Revello Olivo, Ricardo Orlando; Kämpfe, Thomas; Seidel, Konrad; Lederer, Maximilian
Konferenzbeitrag
Conference Paper
2023 28nm HKMG 1F-1R2 Multilevel Memory for Inference Engine Application
De, Sourav; Müller, Franz; Lederer, Maximilian; Raffel, Yannick; Ali, Tarek; Pirro, Luca; Dünkel, Stefan; Beyer, Sven; Seidel, Konrad; Kämpfe, Thomas
Konferenzbeitrag
Conference Paper
2023 A 2-Transistor-2-Capacitor Ferroelectric Edge Compute-in-Memory Scheme with Disturb-Free Inference and High Endurance
Ma, Xiaoyang; Deng, Shan; Wu, Juejian; Zhao, Zijian; Lehninger, David; Ali, Tarek; Seidel, Konrad; De, Sourav; He, Xiyu; Chen, Yiming; Yang, Huazhong; Narayanan, Vijaykrishnan; Datta, Suman; Kämpfe, Thomas; Luo, Qing; Ni, Kai; Li, Xueqing
Zeitschriftenaufsatz
Journal Article
2023 A Ferroelectric BEoL Module: Adding Non-Volatile Memories and Varactors to Existing Technology Nodes
Seidel, Konrad; Lehninger, David; Abdulazhanov, Sukhrob; Sünbül, Ayse; Hoffmann, Raik; Zimmermann, Katrin; Yadav, Nandakishor; Le, Quang Huy; Landwehr, Matthias; Heinig, Andreas; Mähne, Hannes; Bernert, Kerstin; Thiem, Steffen; Kämpfe, Thomas; Lederer, Maximilian
Konferenzbeitrag
Conference Paper
2023 Non-resonant MOEMS mirror for laser cavity-length tuning
Dreyhaupt, André; Oswald, Lucas; Graßhoff, Thomas; Hugger, Stefan; Grahmann, Jan
Konferenzbeitrag
Conference Paper
2023 3-D Monolithic Stacking of Complementary-FET on CMOS for Next Generation Compute-In-Memory SRAM
Baig, Md Aftab; Yeh, Chengjui; Chang, Shuwei; Qiu, Bohan; Huang, Xiaoshan; Tsai, Chenghsien; Chang, Yuming; Sung, Pojung; Su, Chunjung; Cho, Tachun; De, Sourav; Lu, Darsen Duane; Lee, Yaojen; Lee, Wenhsi; Wu, Wenfa; Yeh, Wenkuan
Zeitschriftenaufsatz
Journal Article
2023 Low-power vertically stacked one time programmable multibit IGZO-based BEOL compatible ferroelectric TFT memory devices with lifelong retention for monolithic 3D-inference engine applications
De, Sourav; Thunder, Sunanda; Lehninger, David; Jank, Michael; Lederer, Maximilian; Raffel, Yannick; Seidel, Konrad; Kämpfe, Thomas
Aufsatz in Buch
Book Article
2023 Multilevel Operation of Ferroelectric FET Memory Arrays Considering Current Percolation Paths Impacting Switching Behavior
Müller, Franz; De, Sourav; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Altawil, Abdelrahman; Hoffmann, Raik; Kämpfe, Thomas; Ali, Tarek; Dünkel, Stefan; Mulaosmanovic, Halid; Müller, Johannes; Beyer, Sven; Seidel, Konrad; Gerlach, Gerald
Zeitschriftenaufsatz
Journal Article
2023 Influence of Free Layer Surface Roughness on Magnetic and Electrical Properties of 300 mm CMOS-compatible MTJ Stacks
Durner, Christoph; Lederer, Maximilian; Gurieva, Tatiana; Hertel, Johannes; Hindenberg, Meike; Gerlich, Lukas; Wagner-Reetz, Maik; Parkin, Stuart Stephen Papworth
Zeitschriftenaufsatz
Journal Article
2023 Special Issue "Dynamics and Processes at Laser-Irradiated Surfaces - A Themed Issue in Honor of the 70th Birthday of Professor Jürgen Reif"
Costache, Florenta; Valette, Stéphane; Bonse, J.
Editorial
2023 Demonstration of Large Polarization in Si-doped HfO2 Metal-Ferroelectric-Insulator-Semiconductor Capacitors with Good Endurance and Retention
Hsuen, Jing-Hua; Lederer, Maximilian; Kerkhofs, Lars; Raffel, Yannick; Pirro, Luca; Chohan, Talha; Seidel, Konrad; Kämpfe, Thomas; De, Sourav; Wu, Tian-Li
Konferenzbeitrag
Conference Paper
2023 Impact of Ferroelectric Layer Thickness on Reliability of Back-End-of-Line-Compatible Hafnium Zirconium Oxide Films
Sünbül, Ayse; Lehninger, David; Hoffmann, Raik; Revello Olivo, Ricardo Orlando; Prabhu, Aditya; Schöne, Fred; Kühnel, Kati; Döllgast, Moritz; Haufe, Nora; Roy, Lisa; Kämpfe, Thomas; Seidel, Konrad; Eng, Lukas M.
Zeitschriftenaufsatz
Journal Article
2023 Demonstration of Differential Mode FeFET-Array for multi-precision storage and IMC applications
Parmar, Vivek; Müller, Franz; Hsuen, Jing-Hua; Kingra, Sandeep Kaur; Raffel, Yannick; Lederer, Maximilian; Ali, Tarek; Dünkel, Stefan; Seidel, Konrad; Beyer, Sven; Wu, Tian-Li; Kämpfe, Thomas; De, Sourav; Suri, Manan M.K.
Konferenzbeitrag
Conference Paper
2023 Multi-Level Operation of Ferroelectric FET Memory Arrays for Compute-In-Memory Applications
Müller, Franz; De, Sourav; Lederer, Maximilian; Hoffmann, Raik; Revello Olivo, Ricardo Orlando; Kämpfe, Thomas; Seidel, Konrad; Ali, Tarek; Mulaosmanovic, Halid; Dünkel, Stefan; Müller, Johannes; Beyer, Sven; Gerlach, Gerald
Konferenzbeitrag
Conference Paper
2023 THz Thin Film Varactor Based on Integrated Ferroelectric HfZrO2
Abdulazhanov, Sukhrob; Le, Quang Huy; Huynh, Dang Khoa; Wang, Defu; Lehninger, David; Kämpfe, Thomas; Gerlach, Gerald
Zeitschriftenaufsatz
Journal Article
2023 2D MEMS vector scanning mirrors for LIDAR, medical imaging, and high laser power applications
Sandner, Thilo; Mustin, Benjamin; Birnbaum, Klemens; Blasl, Martin; Graßhoff, Thomas; Schwarzenberg, Markus; Grahmann, Jan
Konferenzbeitrag
Conference Paper
2023 On the Stability and Homogeneous Ensemble of Feature Selection for Predictive Maintenance: A Classification Application for Tool Condition Monitoring in Milling
Assafo, Maryam; Städter, Jost Philipp; Meisel, Ténia; Langendoerfer, Peter
Zeitschriftenaufsatz
Journal Article
2022 Potentials and Limitations of Multipath Lenses for Optical Wireless Transceivers
Kirrbach, Rene; Stephan, Mira; Faulwaßer, Michael; Schneider, Tobias; Noack, Alexander; Deicke, Frank
Vortrag
Presentation
2022 SEC-Learn: Sensor Edge Cloud for Federated Learning
Aichroth, Patrick; Antes, Christoph; Gembaczka, Pierre; Graf, Holger; Johnson, David S.; Jung, Matthias; Kämpfe, Thomas; Kleinberger, Thomas; Köllmer, Thomas; Kuhn, Thomas; Kutter, Christoph; Krüger, Jens; Loroch, Dominik M.; Lukashevich, Hanna; Laleni, Nelli; Zhang, Lei; Leugering, Johannes; Martín Fernández, Rodrigo; Mateu, Loreto; Mojumder, Shaown; Prautsch, Benjamin; Pscheidl, Ferdinand; Roscher, Karsten; Schneickert, Sören; Vanselow, Frank; Wallbott, Paul; Walter, Oliver; Weber, Nico
Konferenzbeitrag
Conference Paper
2022 Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2 thin film in 3D-integration
Lehmkau, R.; Mutschall, D.; Kaiser, A.; Ebermann, M.; Neumann, N.; Czernohorsky, Malte; Neuber, Markus; Hiller, K.; Seiler, J.; Großmann, Toni
Konferenzbeitrag
Conference Paper
2022 Optimization of LPCVD phosphorous-doped SiGe thin films for CMOS-compatible thermoelectric applications
Schwinge, Caroline; Kühnel, Kati; Emara, Jennifer Salah; Roy, Lisa; Biedermann, Kati; Weinreich, Wenke; Kolodinski, S.; Wiatr, M.; Gerlach, G.; Wagner-Reetz, Maik
Zeitschriftenaufsatz
Journal Article
2022 READ-Optimized 28nm HKMG Multibit FeFET Synapses for Inference-Engine Applications
De, Sourav; Müller, Franz; Le, H.-H.; Lederer, Maximilian; Raffel, Yannick; Ali, T.; Lu, D.; Kämpfe, Thomas
Zeitschriftenaufsatz
Journal Article
2022 Heavy ion irradiation induced phase transitions and their impact on the switching behavior of ferroelectric hafnia
Lederer, Maximilian; Vogel, Tobias; Kämpfe, Thomas; Kaiser, Nico; Piros, Eszter; Revello Olivo, Ricardo Orlando; Ali, Tarek Nadi Ismail; Petzold, Stefan; Lehninger, David; Trautmann, Christina K.; Alff, Lambert; Seidel, Konrad
Zeitschriftenaufsatz
Journal Article
2022 Review on the Microstructure of Ferroelectric Hafnium Oxides
Lederer, Maximilian; Lehninger, David; Ali, Tarek Nadi Ismail; Kämpfe, Thomas
Review
2022 Ferroelectric FETs with Separated Capacitor in the Back-End-of-Line: Role of the Capacitance Ratio
Lehninger, David; Hoffmann, Raik; Sünbül, Ayse; Mähne, Hannes; Kämpfe, Thomas; Bernert, Kerstin; Thiem, Steffen; Seidel, Konrad
Zeitschriftenaufsatz
Journal Article
2022 Raman Spectroscopy as a Key Method to Distinguish the Ferroelectric Orthorhombic Phase in Thin ZrO2-Based Films
Materano, M.; Reinig, Peter; Kersch, A.; Popov, M.; Deluca, M.; Mikolajick, T.; Boettger, U.; Schroeder, U.
Zeitschriftenaufsatz
Journal Article
2022 Passivation and Electrical Properties of Alumina Layers Deposited by Atomic-Layer Deposition with Different Precursors
Kolkovsky, Vladimir; Lange, Nicolas
Zeitschriftenaufsatz
Journal Article
2022 Additive manufacturing of a passive, sensor-monitored 16MnCr5 steel gear incorporating a wireless signal transmission system
Binder, Maximilian; Stapff, Veronika Andrea; Heinig, Andreas; Schmitt, Matthias; Seidel, Christian; Reinhart, G.
Zeitschriftenaufsatz
Journal Article
2022 Enablement of CMOS integrated sensor, harvesting and storage applications by ferroelectric HfO2
Weinreich, Wenke; Lederer, Maximilian; Czernohorsky, Malte
Konferenzbeitrag
Conference Paper
2022 Demonstration of Fatigue and Recovery Phenomena in Hf0.5Zr0.5O2-based 1T1C FeRAM Memory Arrays
Okuno, J.; Yonai, T.; Kunihiro, T.; Konishi, K.; Materano, M.; Ali, Tarek Nadi Ismail; Lederer, Maximilian; Seidel, Konrad; Mikolajick, T.; Schroeder, U.; Tsukamoto, M.; Umebayashi, T.
Konferenzbeitrag
Conference Paper
2022 The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers
Kaiser, Bert; Schenk, Hermann A.G.; Ehrig, Lutz; Wall, Franziska; Monsalve Guaracao, Jorge Mario; Langa, Sergiu; Stolz, Michael; Melnikov, Anton; Conrad, Holger; Schuffenhauer, David; Schenk, Harald
Zeitschriftenaufsatz
Journal Article
2022 Proof of concept of an air-coupled electrostatic ultrasonic transducer based on lateral motion
Monsalve Guaracao, Jorge Mario; Melnikov, Anton; Stolz, Michael; Mrosk, Andreas; Jongmanns, Marcel; Wall, Franziska; Langa, Sergiu; Marica-Bercu, Ioana; Brändel, Tim; Kircher, Marco; Schenk, Hermann A.G.; Kaiser, Bert; Schenk, Harald
Zeitschriftenaufsatz
Journal Article
2022 Roadmap for Ferroelectric Memory: Challenges and Opportunities for IMC Applications
De, Sourav; Lederer, Maximilian; Raffel, Yannick; Müller, Franz; Seidel, Konrad; Kämpfe, Thomas
Konferenzbeitrag
Conference Paper
2022 Seebeck effect and Joule heating in CoFeB/MgO/CoFeB-based perpendicular magnetic tunnel junctions with low resistance area product
Lv, H.; Fidalgo, J.; Kämpfe, Thomas; Langer, J.; Wrona, J.; Ocker, B.; Freitas, P.P.; Cardoso, S.
Zeitschriftenaufsatz
Journal Article
2022 300 mm CMOS-compatible fabrication of Ru2Si3 sub-50 nm thin films and characterization
Hertel, Johannes; Schwinge, Caroline; Gerlich, Lukas; Wagner-Reetz, Maik
Zeitschriftenaufsatz
Journal Article
2022 A Performance Study of 22nm FDSOI CMOS for Wideband 5G Power Amplifier Applications
Le, Quang Huy; Huynh, Dang Khoa; Nayak, Anurag; Kämpfe, Thomas; Rudolph, Matthias
Konferenzbeitrag
Conference Paper
2022 Study of Nanosecond Laser Annealing on Silicon Doped Hafnium Oxide Film Crystallization and Capacitor Reliability
Ali, Tarek Nadi Ismail; Revello Olivo, Ricardo Orlando; Kerdiles, S.; Lehninger, David; Lederer, Maximilian; De, Sourav; Royet, A.-S.; Sünbül, Ayse; Prabhu, Aditya; Kühnel, Kati; Czernohorsky, Malte; Rudolph, Matthias; Hoffmann, Raik; Charpin-Nicolle; Grenouillet, L.; Kämpfe, Thomas; Seidel, Konrad
Konferenzbeitrag
Conference Paper
2022 Three Level Charge Pumping On Dielectric Hafnium Oxide Gate
Raffel, Yannick; Drescher, Maximilian; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Hoffmann, Raik; Pirro, Luca; Chohan, Talha; Kämpfe, Thomas; Seidel, Konrad; De, Sourav; Heitmann, J.
Konferenzbeitrag
Conference Paper
2022 Tuning Hyrbrid Ferroelectric and Antiferroelectric Stacks for Low Power FeFET and FeRAM Applications by Using Laminated HSO and HZO films
Ali, T.; Lehninger, D.; Lederer, M.; Li, S.; Kühnel, K.; Mart, C.; Mertens, K.; Hoffmann, R.; Olivo, R.; Emara, J.; Biedermann, K.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Zeitschriftenaufsatz
Journal Article
2022 Reliability of Ferroelectric and Antiferroelectric Si:HfO2 materials in 3D capacitors by TDDB studies
Viegas, Alison Erlene; Falidas, Konstantinos Efstathios; Ali, Tarek Nadi Ismail; Kühnel, Kati; Hoffmann, Raik; Mart, C.; Czernohorsky, Malte; Heitmann, J.
Konferenzbeitrag
Conference Paper
2022 28 nm HKMG-Based Current Limited FeFET Crossbar-Array for Inference Application
De, Sourav; Müller, Franz; Thunder, Sunanda; Abdulazhanov, Sukhrob; Laleni, Nelli; Lederer, Maximilian; Ali, T.T.; Raffel, Yannick; Dünkel, Stefan; Mojumder, Shaown; Vardar, Alptekin; Beyer, Sven; Seidel, Konrad; Kämpfe, Thomas
Zeitschriftenaufsatz
Journal Article
2022 Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation
Schweiger, Severin; Schulze, Tim; Schlipf, Simon; Reinig, Peter; Schenk, Harald
Zeitschriftenaufsatz
Journal Article
2022 Achieving software-equivalent accuracy for hyperdimensional computing with ferroelectric-based in-memory computing
Kazemi, Arman; Müller, Franz; Sharifi, Mohammad Mehdi; Errahmouni, Hamza; Gerlach, Gerald; Kämpfe, Thomas; Imani, Mohsen; Hu, Xiaobo Sharon; Niemier, Michael Thaddeus
Zeitschriftenaufsatz
Journal Article
2022 Fe-Related Defects in Si: Laplace Deep-Level Transient Spectroscopy Studies
Gwozdz, K.; Kolkovsky, Vladimir
Zeitschriftenaufsatz
Journal Article
2022 Machine Learning Assisted Statistical Variation Analysis of Ferroelectric Transistors: From Experimental Metrology to Predictive Modeling
Choe, G.; Ravindran, P.V.; Lu, A.; Hur, J.; Lederer, Maximilian; Reck, André; Lombardo, S.; Afroze, N.; Kacher, J.; Khan, A.I.; Yu, S.
Konferenzbeitrag
Conference Paper
2022 Experimental Test Setup of an Airwall to Reduce the Convective Heat Loss in Solar Thermal Cavity Receivers
Bitterling, Moritz; Bern, Gregor; Fugmann, Hannes; Cohnen, Christopher; Fluri, Thomas; Sonnabend, Thomas; Karl, Martin
Vortrag
Presentation
2022 Memory Array Demonstration of fully integrated 1T-1C FeFET concept with separated ferroelectric MFM device in interconnect layer
Seidel, Konrad; Lehninger, David; Hoffmann, Raik; Mähne, H.; Ali, Tarek Nadi Ismail; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Bernert, K.; Biedermann, Kati; Thiem, S.; Mertens, Konstantin; Heinig, Andreas; Landwehr, Matthias; Shen, Yukai; Wang, Defu; Kämpfe, Thomas
Konferenzbeitrag
Conference Paper
2022 Fluorite-Structured Ferroelectric and Antiferroelectric Materials: A Gateway of Miniaturized Electronic Devices
Al, F.; Ali, Tarek Nadi Ismail; Lehninger, David; Sünbül, Ayse; Viegas, Alison Erlene; Sachdeva, Ridham; Abbas, A.; Czernohorsky, Malte; Seidel, Konrad
Review
2022 Endurance improvements and defect characterization in ferroelectric FETs through interface fluorination
Raffel, Yannick; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Müller, Franz; Hoffmann, Raik; Ali, Tarek Nadi Ismail; Mertens, K.; Pirro, L.; Drescher, M.; Beyer, S.; Kämpfe, Thomas; Seidel, Konrad; Eng, L.M.; Heitmann, J.
Konferenzbeitrag
Conference Paper
2022 FELIX: A Ferroelectric FET Based Low Power Mixed-Signal In-Memory Architecture for DNN Acceleration
Soliman, Taha; Laleni, Nelli; Kirchner, Tobias; Müller, Franz; Shrivastava, Ashish; Kämpfe, Thomas; Guntoro, Andre T.; Wehn, Norbert
Zeitschriftenaufsatz
Journal Article
2022 BEoL integrated hafnium zirconium oxide varactors for tunable mmWave applications
Abdulazhanov, Sukhrob; Huynh, Dang Khoa; Le, Quanghuy; Lehninger, David; Kämpfe, Thomas; Gerlach, Gerald
Konferenzbeitrag
Conference Paper
2022 Squeeze film damping in MEMS loudspeakers: Analysis of a clamped-clamped microbeam
Melnikov, Anton; Schenk, H.A.G.; Wall, Franziska; Monsalve, Jorge M.; Ehrig, L.; Stolz, Michael; Mrosk, Andreas; Langa, Sergiu; Kaiser, Bert
Konferenzbeitrag
Conference Paper
2022 Pyroelectric and Ferroelectric Properties of Hafnium Oxide Doped with Si via Plasma Enhanced ALD
Neuber, Markus; Lederer, Maximilian; Mertens, Konstantin; Kämpfe, Thomas; Czernohorsky, Malte; Seidel, Konrad
Zeitschriftenaufsatz
Journal Article
2022 MEMS Piston Mirror Arrays for Computer Generated Holography
Dürr, Peter; Neudert, Andreas; Nitzsche, Mario; Hohle, Christoph; Stolle, H.; Pleikies, J.
Konferenzbeitrag
Conference Paper
2022 Electrically Actuated Microbeams: An Explicit Calculation of the Coulomb Integral in the Entire Stable and Unstable Regimes Using a Chebyshev-Edgeworth Approach
Schenk, H.A.G.; Melnikov, Anton; Wall, Franziska; Gaudet, M.; Stolz, Michael; Schuffenhauer, David; Kaiser, Bert
Zeitschriftenaufsatz
Journal Article
2022 Reliability Study of 1T1C FeRAM Arrays with Hf0.5Zr0.5O2 Thickness Scaling
Okuno, J.; Kunihiro, T.; Konishi, K.; Shuto, Y.; Sugaya, F.; Materano, M.; Ali, Tarek Nadi Ismail; Lederer, Maximilian; Kuehnel, Kati; Seidel, Konrad; Mikolajick, T.; Schroeder, U.; Tsukamoto, M.; Umebayashi, T.
Zeitschriftenaufsatz
Journal Article
2022 Synergistic Approach of Interfacial Layer Engineering and READ-Voltage Optimization in HfO2-Based FeFETs for In-Memory-Computing Applications
Raffel, Yannick; De, Sourav; Lederer, Maximilian; Revello Olivo, Ricardo Orlando; Hoffmann, Raik; Thunder, Sunanda; Pirro, Luca; Beyer, Sven; Chohan, Talha; Kämpfe, Thomas; Seidel, Konrad; Heitmann, J.
Zeitschriftenaufsatz
Journal Article
2022 Structural and Electrical Response of Emerging Memories Exposed to Heavy Ion Radiation
Vogel, Tobias; Zintler, Alexander; Kaiser, Nico; Guillaume, Nicolas; Lefèvre, Gauthier; Lederer, Maximilian; Serra, Anna Lisa; Piros, Eszter; Kim, Taewook; Schreyer, Philipp; Winkler, Robert; Nasiou, Déspina; Revello Olivo, Ricardo Orlando; Ali, Tarek Nadi Ismail; Lehninger, David; Arzumanov, Alexey; Charpin-Nicolle, Christelle; Bourgeois, Guillaume; Grenouillet, Laurent; Cyrille, Marie Claire; Navarro, Gabriele; Seidel, Konrad; Kämpfe, Thomas; Petzold, Stefan; Trautmann, Christina K.; Molina-Luna, Leopoldo; Alff, Lambert
Zeitschriftenaufsatz
Journal Article
2022 FeFET versus DRAM based PIM Architectures: A Comparative Study
Sudarshan, Chirag; Soliman, Taha; Kämpfe, Thomas; Weis, Christian; Wehn, Norbert
Konferenzbeitrag
Conference Paper
2022 Impact of Stack Structure Control and Ferroelectric Material Optimization in Novel Laminate HSO and HZO MFMIS FeFET
Ali, Tarek Nadi Ismail; Mertens, K.; Revello Olivo, Ricardo Orlando; Lehninger, David; Lederer, Maximilian; Müller, Franz; Rudolph, Matthias; Oehler, Sebastian; Kühnel, Kati; Hoffmann, Raik; Schramm, Philipp; Czernohorsky, Malte; Kämpfe, Thomas; Seidel, Konrad
Konferenzbeitrag
Conference Paper
2022 Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters
Falidas, Konstantinos Efstathios; Kühnel, Kati; Rudolph, Matthias; Everding, Maximilian; Czernohorsky, Malte; Heitmann, J.
Zeitschriftenaufsatz
Journal Article
2022 Total Internal Reflection Lens for Optical Wireless Receivers
Kirrbach, Rene; Schneider, Tobias; Stephan, Mira; Noack, Alexander; Faulwaßer, Michael; Deicke, Frank
Zeitschriftenaufsatz
Journal Article
2022 Microacoustic Metagratings at Ultra-High Frequencies Fabricated by Two-Photon Lithography
Melnikov, Anton; Köble, Sören; Schweiger, Severin; Chiang, Y.K.; Marburg, S.; Powell, D.A.
Zeitschriftenaufsatz
Journal Article
2022 Histogram formation and noise reduction in biaxial MEMS-based SPAD light detection and ranging systems
Burkard, Roman; Ligges, Manuel; Merten, André; Sandner, Thilo; Viga, Reinhard; Grabmaier, Anton
Zeitschriftenaufsatz
Journal Article
2022 Investigation of BEoL integrated ferroelectric thin-film HfO2 for mmWave varactor applications
Abdulazhanov, Sukhrob; Huynh, Dang Khoa; Le, Quanghuy; Lehninger, David; Kämpfe, Thomas; Gedach, Gerald
Konferenzbeitrag
Conference Paper
2022 MEMS-based confocal laser scanning fluorescence microscopy for tumor demarcation in oncological surgery
Reinig, Peter; Dallmann, Hans-Georg; Schwarzenberg, Markus; Ziebarth, Johannes; Knobbe, Jens; Junek, J.; Herbst, R.; Rathert, J.; Gerlach, R.; Blache, Ulrich; Tretbar, Sandy; Fricke, Stephan
Konferenzbeitrag
Conference Paper
2022 Integration of BEoL Compatible 1T1C FeFET Memory Into an Established CMOS Technology
Lehninger, David; Mähne, H.; Ali, Tarek Nadi Ismail; Hoffmann, Raik; Revello Olivo, Ricardo Orlando; Lederer, Maximilian; Bernert, K.; Kämpfe, Thomas; Biedermann, Kati; Landwehr, Matthias; Heinig, Andreas; Thiem, S.; Mertens, Konstantin; Wang, Defu; Shen, Yukai; Seidel, Konrad
Konferenzbeitrag
Conference Paper
2022 Demonstration of Multiply-Accumulate Operation with 28 nm FeFET Crossbar Array
De, Sourav; Müller, Franz; Laleni, Nelli; Lederer, Maximilian; Raffel, Yannick; Mojumder, Shaown; Vardar, Alptekin; Abdulazhanov, Sukhrob; Ali, T.T.; Dünkel, Stefan; Beyer, Sven; Seidel, Konrad; Kämpfe, Thomas
Zeitschriftenaufsatz
Journal Article
2022 Design and characterization of a pyroelectric detector based on three-dimensional structured hafnium oxide thin films
Lehmkau, Robin; Mutschall, Doris; Kaiser, Alena; Ebermann, Martin; Neumann, Nobert; Czernohorsky, Malte; Neuber, Markus; Hiller, Karla; Seiler, Jan; Großmann, Toni; Shaporin, Alexey; Lienig, Jens
Zeitschriftenaufsatz
Journal Article
2022 Bending Resistant Multibit Memristor for Flexible Precision Inference Engine Application
Pal, P.; Lee, K.-J.; Thunder, S.; De, Sourav; Huang, P.T.; Kämpfe, Thomas; Wang, Y.H.
Zeitschriftenaufsatz
Journal Article
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