Industrial Solutions for Processes

The digital transformation of industrial production demands sensor systems that function like multidimensional sensory organs. At Fraunhofer IPMS, we are developing MEMS-based microscanning mirrors that allow robots to perceive their surroundings in three dimensions, mimicking human vision and enabling more complex, adaptive, and autonomous behaviors.

"Scanning Eye": Robotic Vision Using LiDAR Technology

Our research team is pursuing the concept of a "scanning eye": a compact mirror-based scanner module that captures high-resolution 3D images by combining two-dimensional light deflection with time-of-flight (ToF) measurements. This system is based on the LiDAR (Light Detection and Ranging) principle — the MEMS mirror modulates a laser beam and analyzes the reflected signals to reconstruct spatial depth.

3D Machine Vision with MEMS Scanning Mirrors - Compact, Robust, and Versatile

The miniaturized MEMS scanner modules are highly robust, easy to integrate, and ideally suited for mobile use, for example, on robotic arms in automated production lines. These systems allow robots to:

• Continuously monitor their surroundings
• Recognize workpieces and tasks in real time
• Assess and verify the quality of their own performance

The "robotic eye" operates autonomously and can be expanded with additional sensing capabilities.

Beyond 3D vision, the system supports non-destructive material analysis and spectroscopic environmental sensing. Through technologies such as infrared spectroscopy or quantum cascade laser spectroscopy, the scanner can identify materials based on their spectral fingerprint, enabling precise substance recognition.

Real-World Applications

The Fraunhofer IPMS scanning mirror platform opens new possibilities in diverse fields:

• Quality control of drinking water
• Pharmaceutical inspection and counterfeit detection
• Remote monitoring of industrial plants and systems
• Leak detection in pipelines
• Detection of hazardous or flammable substances

With this cutting-edge sensor technology, Fraunhofer IPMS is driving the future of intelligent machine perception, process safety, and autonomous production systems.

Fraunhofer IPMS supports semiconductor manufacturers, suppliers, and material developers with comprehensive screening and evaluation services for materials, processes, chemicals, and consumables, from laboratory setups to production scale. With a state-of-the-art 200/300 mm equipment line, ISO 9001 certification, and over a decade of experience, we help reduce development time, costs, and risk.

Your Reliable Partner for Material and Process Qualification

We offer a proven and flexible test platform under near-production conditions:

• Industrial-grade environment with standard semiconductor equipment (200/300 mm)
• Professional wafer handling, contamination control, and cleanroom operation certified to ISO 9001
• Independent evaluation with full experimental control and documentation
• Direct wafer exchange with industrial fabs, enabling short process loops
• Pre- and post-processing services for the optimization of individual process steps
• Rapid scale-up from lab validation to fab integration, based on 10+ years of experience
• Cost-efficient use of resources (equipment, staff, time)

Fraunhofer IPMS bridges the gap between material innovation and industrial adoption, thus providing trusted support to IC manufacturers, material suppliers, and equipment vendors alike.

Our services:

• Consumable benchmarking
• Process development
• Ultra Large Scale Integration (ULSI)
• Pilot manufacturing
• Equipment evaluation
  

Optical Coherence Tomography (OCT) enables high-resolution, three-dimensional imaging of surface and subsurface structures with micrometer precision. Unlike conventional ultrasound, OCT uses infrared light instead of sound, allowing contact-free, non-invasive inspection without ionizing radiation - at the speed of light.

This advanced method enables fast, accurate, and volumetric characterization of materials without damaging the product. Surface uniformity, coating thickness, and internal structural features can be visualized in real time. By identifying defects early, OCT helps optimize production processes, improve quality assurance, and reduce costs. In case of critical deviations, immediate corrective actions can be triggered.

OCT for Smart Automation

To support adaptive manufacturing, the Fraunhofer IPMS OCT spectroscope can be integrated directly into a robot arm, enabling industrial robots to make autonomous decisions, such as adjusting or halting production, based on real-time material inspection.

Fraunhofer IPMS Expertise in OCT

We provide:

• Application-specific OCT feasibility studies
• Customized OCT inspection systems for lab use, product testing, and inline process monitoring
• Integration of OCT into smart manufacturing environments and robotic systems

Whether for pharmaceuticals, electronics, semiconductors, or packaging, our tailored solutions ensure precise quality control and efficient process optimization across a wide range of industries.

Fraunhofer IPMS is developing advanced multi-sensor systems designed to characterize flowing gases with high precision. These innovative systems simultaneously measure key parameters such as volume flow, gas composition, pressure, and temperature, enabling cost-effective, compact, and scalable alternatives to conventional gas measurement systems.

Capacitive Ultrasound Flow Sensing

At the heart of the system is a flow sensor based on capacitive micromachined ultrasonic transducer (CMUT) technology, optimized for non-corrosive gases. The sensor is designed for small-diameter applications (below DN50), making it ideal for industrial settings where space and precision are critical.

MEMS-Based Hydrogen Sensing

In parallel, Fraunhofer IPMS is developing a MEMS hydrogen sensor that uses sound velocity measurement to detect binary gas mixtures. This compact sensor provides a reliable method for hydrogen detection in various industrial and energy applications.

Modular Platform for Diverse Applications

The modular multi-sensor platform is flexible and adaptable, allowing customization for specific use cases and gas types. Beyond gaseous media, the technology can be extended to liquid characterization, such as monitoring the aging of industrial oils or enabling biomedical applications like blood diagnostics.

Fraunhofer IPMS is Driving Innovation in Smart Gas Sensing

With expertise in MEMS technology, acoustic sensors, and integrated electronics, Fraunhofer IPMS delivers next-generation solutions for industrial process control, energy systems, and healthcare diagnostics. Our multi-sensor platforms offer new possibilities for real-time monitoring, predictive maintenance, and resource-efficient operations.

Ultrasonic spectroscopy is a powerful method for characterizing the physical and chemical properties of liquid media. By analyzing the frequency-dependent attenuation and speed of sound, this technique enables precise insight into the composition, concentration, and quality of substances such as oils, alcohol-water mixtures, and other process-relevant fluids. It complements optical spectroscopy and expands the toolbox for non-invasive, real-time monitoring. Scattering effects also make it possible to detect particles, suspended solids, or impurities in complex solutions.

CMUT-Based Ultrasonic Sensors from Fraunhofer IPMS

At the core of this technology are capacitive micromachined ultrasonic transducers (CMUTs) developed by Fraunhofer IPMS. Unlike conventional piezoelectric elements, CMUTs are produced via micromechanical fabrication techniques, allowing for ultra-compact and integrable sensor designs tailored for environmental and industrial liquid monitoring.

The key advantages of CMUTs include:

• Miniaturized form factor suitable for chip integration
• Excellent acoustic coupling to liquid media for maximum efficiency
• Broad frequency bandwidth and high sensitivity
• CMOS-compatible integration for complete on-chip analysis systems

These features make CMUTs ideal for inline monitoring, process control, and predictive maintenance in sectors such as chemical processing, pharmaceutical production, and environmental diagnostics.

Development Services and Evaluation Systems

Fraunhofer IPMS offers a comprehensive service portfolio, including:

• Custom CMUT design and development
• Application-specific acoustic spectroscopy solutions
• System integration and characterisation
• Evaluation kits for spectral condition monitoring

With decades of experience in MEMS sensor technology, Fraunhofer IPMS provides robust, scalable solutions for precise, contactless material analysis.

Spectroscopic methods are increasingly adopted for non-destructive optical material testing across industries. The near-infrared (NIR) spectral range (covering wavelengths from 900 to 1900 nm) is especially effective for analyzing plastics, food products, and agricultural goods.

As the need for fast, on-site analysis grows, there is rising demand for compact, mobile NIR spectroscopy systems that are both cost-effective and highly accurate. These systems enable critical applications such as:

• Real-time supply chain monitoring
• Process optimization
• Quality control in incoming goods
• Environmental monitoring

To meet this demand, Fraunhofer IPMS, in collaboration with Hiperscan GmbH, is developing miniaturized, MEMS-based NIR spectrometers tailored for field use. These cutting-edge solutions make high-precision NIR analysis accessible anytime, anywhere.

The TRISTAN project aims to expand the European RISC-V ecosystem by developing a non-patented, freely accessible platform for processor architectures. This includes a broad range of essential components and is intended to support diverse industrial applications, such as automated driving and edge computing.

The project focuses on creating:

• RISC-V processors
• Peripheral components
• Software libraries
• Design tools and methodologies for chip development

By promoting an open-source, license-free alternative to predominantly non-European commercial solutions, TRISTAN contributes to Europe’s digital and technological sovereignty. The open approach also enables cost-effective processor systems with high energy efficiency, paving the way for scalable and sustainable innovation.

As part of the consortium, Fraunhofer IPMS is developing an open-source trace module (IP) for embedded RISC-V processors. Based on established specifications such as Nexus TCODE 7, this trace IP will be integrated into the existing EMSA5 RISC-V processor developed at Fraunhofer IPMS.

A key outcome will be a demonstrator showcasing:

• Real-time, interference-free tracing
• Concurrent use of the processor interface by user applications
• Integration with TSN-capable Ethernet endpoint IP

By enabling reliable real-time data tracking and seamless system integration, the project supports more transparent, efficient, and safer industrial processes, particularly in automation, diagnostics, and predictive maintenance.

In the joint project ImaB-Edge, an intelligent electronic system is designed to continuously monitor the structural health of infrastructure such as bridges, buildings, and roads.

AI-Driven Edge Computing for Structural Health Monitoring

Embedded sensors collect real-time data directly from the infrastructure. This data is analyzed on-site using artificial intelligence (AI) to evaluate the current condition of the structure. The results are then transmitted to a control center or maintenance personnel, enabling preventive maintenance and enhancing infrastructure safety while reducing long-term costs.

Within the project, Fraunhofer IPMS is responsible for developing a high-performance, energy-efficient computing cluster based on scalable RISC-V processors. The system integrates hardware accelerators, including those using RISC-V Vector Extensions, to enable fast and efficient processing.

The central component, the EDGE gateway, functions as:

• a standalone data collection hub for permanently installed sensor nodes,
• an interface for non-destructive testing (NDT) systems used in construction, and
• a centralized operator interface that connects local data with historical analysis.

Additionally, the EDGE gateway enables expert knowledge integration, improving sensor accuracy and system intelligence. This innovation supports smarter infrastructure monitoring, faster response times, and predictive maintenance strategies..