Capacitive Micromachined Ultrasonic Transducer (CMUT)

Whether you are a fabless company, want to test new specifications outside your established production processes, or aim to scale your own MEMS technology for volume production and industrial readiness: We develop and manufacture your MEMS components with precision, flexibility, and the highest quality.

In our 200 mm clean room, we offer the entire process chain for the fabrication of CMUTs, from development and prototypes to pilot production. You benefit from our years of experience in MEMS technology and access to state-of-the-art manufacturing equipment.

We support you from concept to pilot production - flexibly combined as needed:

✔ Feasibility studies & specification development
✔ Demonstrator and prototype development for CMUTs, including testing and validation
✔ Ramp-up and pilot production of CMUTs in our ISO-certified 200 mm cleanroom
✔ Development and manufacturing on customer-specific substrates
✔ Supplementary services: wafer-level testing, material analysis, design support, and more.

Fraunhofer IPMS has many years of experience in the development of CMUT components and systems. A proprietary CMUT manufacturing process developed at Fraunhofer IPMS enables the production of CMUTs within the Back-End-of-Line (BEoL) process module. This allows the integration of CMUT modules into standard CMOS processes, a unique feature of this technology.

Combined with expertise in electronics development and ultrasound signal processing, Fraunhofer IPMS offers the entire value chain for the research and development of CMUTs. This includes consulting, development, characterization, and prototype supply of CMUT components, modules, and systems, as well as pilot manufacturing.

What are the key benefits of CMUT technology?

CMUT technology offers several advantages, including miniaturization, freedom of design for apertures, multichannel arrays, low-cost reproducible fabrication, high bandwidth, excellent coupling without matching or backing layers, and compatibility with CMOS technology for circuit integration.

How does CMUT technology compare to other ultrasonic transducer technologies?

CMUTs use capacitive coupling to generate and receive ultrasound waves, offering excellent bandwidth and frequency response, high sensitivity, and easy integration with CMOS electronics. In comparison, PMUTs (Piezoelectric Micromachined Ultrasonic Transducers) use the piezoelectric effect and have moderate sensitivity, while bulk piezoelectric transducers use the direct piezoelectric effect and are larger and more challenging to integrate.

How does Fraunhofer IPMS support innovation in CMUT-technology?

Fraunhofer IPMS provides a comprehensive service process for MEMS technology, including Concept, MUT-Design, Manufacturing, Testing, and Pilot Fabrication. 

How can companies fast evaluate the CMUT technology?

Companies can use our CMUT-CEK (customer evaluation kit). The CMUT evaluation kit includes CMUT transducer, a control board, software for data acquisition and analysis, and detailed documentation to help users get started quickly.

How can companies collaborate with Fraunhofer IPMS?

Companies can collaborate with Fraunhofer IPMS through various methods, including Direct Order Projects, Publicly Funded Projects, Strategic Partnerships, and Licensing. Each method is tailored to different goals, businesses, and budgets.

You can find more information here.

What collaboration opportunities are available for small and medium-sized companies?

Small and medium-sized companies can benefit from joint projects in public funding initiatives by i.e. the Federal Ministry of Research, Technology and Space (BMFTR) that is open for submissions throughout the year.

You can find more information here.

What opportunities are there for universities and research institutes?

Universities and research institutes can work with Fraunhofer IPMS through special funding programs of the Fraunhofer-Gesellschaft, such as the FhG-MPI funding. They can also participate in nationally or internationally funded joint projects.

Mehr Informationen finden Sie here.

What are the benefits of working with Fraunhofer IPMS?

Fraunhofer IPMS offers extensive expertise with over 300 scientists, state-of-the-art infrastructure, ISO certified processes, and a commitment to confidentiality. They tailor their cooperation to individual requirements and provide a protected environment for innovations.