200 mm MEMS Cleanroom

Research and development offer

Fraunhofer IPMS offers its customers the complete service for the development of micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) on 200 mm wafers. The technological development and support of MEMS technologies, from individual processes to technology modules to complete technology, as well as the process-related support of the systems in the clean room, is provided by our team of over 90 engineers, operators and technicians. On customer request, we take over the pilot manufacturing after the successful development or support a technology transfer, whereby the Fraunhofer IPMS covers the technological maturity levels (TRL) from three to eight.

Our advantages and features

Advantages

  • Extensive technological competence in the field of surface micromechanics, bulk micromechanics, "active" silicon as well as MEMS-on-CMOS integration
  • One-stop store for individual requirements along the entire value chain
  • Low investment costs especially for start-ups, SMEs and companies in niche markets without own fab
  • Pilot production in a state-of-the-art clean room according to industrial standards and modern equipment park
  • Intensive support of the manufacturing processes by experienced engineers and operators
  • DUV lithography cluster with which structures of 130 nm L&S can be realized
Features
  • Low volume & high mix
  • 24/5 - 3 shift operation
  • 45 engineers + 45 operators and maintenance technicians
  • i-line (400nm L&S) and DUV cluster (130nm L&S)
  • ~1,000 wafer starts per month
  • CMOS compatibility
  • Class 10 (ISO 4) on 1,500 m²
  • ISO 9001:2015 certification
  • MES for planning, traceability and documentation

Virtual tour of our 200 mm MEMS cleanroom

MEMS Technologies

MEMS Applications

Fraunhofer Group for Microelectronics

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