Cleanrooms

200 mm MEMS

• MEMS Technologies Dresden: 1500 m² cleanroom (class 4 according to ISO 14644-1)
• Technology development up to pilot production of innovative microsystems on 200 mm 
• Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS)

200 mm Microdisplay Cleanroom 

• 300 m² clean room class 5 (according to ISO 14644-1)
• Pilot line for microdisplays and sensors
• Thin-film encapsulation, structuring and layer characterization

300 mm CMOS

• 2700 m² class 6 and 3 clean room (according to ISO 14644-1)
• Development services on 300mm wafers in the area of FEoL and BEoL 
• Services on ultra large scale integration level 
• Analytics, Metrology & Characterization