Our Fraunhofer IPMS cleanrooms:


  • MEMS Technologies Dresden: 1500 m² cleanroom (class 4 according to ISO 14644-1)
  • Technology development up to pilot production of innovative microsystems on 200 mm 
  • Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS)



  • 4000 m² class 6 and 3 clean room (according to ISO 14644-1)
  • Development services on 300mm wafers in the area of FEoL and BEoL 
  • Services on ultra large scale integration level 
  • Analytics, Metrology & Characterization

Fraunhofer IPMS

200 mm MEMS Cleanroom


Fraunhofer IPMS

300 mm CMOS Cleanroom


Fraunhofer IPMS

Analytics, Metrology and Characterization