Our Fraunhofer IPMS cleanrooms:
200mm
- MEMS Technologies Dresden: 1500 m² cleanroom (class 4 according to ISO 14644-1)
- Technology development up to pilot production of innovative microsystems on 200 mm
- Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS)
300mm
- 4000 m² class 6 and 3 clean room (according to ISO 14644-1)
- Development services on 300mm wafers in the area of FEoL and BEoL
- Services on ultra large scale integration level
- Analytics, Metrology & Characterization