Cleanrooms

200mm

• MEMS Technologies Dresden: 1500 m² cleanroom (class 4 according to ISO 14644-1)
• Technology development up to pilot production of innovative microsystems on 200 mm 
• Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS)

300mm

• 4000 m² class 6 and 3 clean room (according to ISO 14644-1)
• Development services on 300mm wafers in the area of FEoL and BEoL 
• Services on ultra large scale integration level 
• Analytics, Metrology & Characterization