MEMS based Micropositioning Platforms

Micropositioning platforms

© Fraunhofer IPMS
The picture shows the basic concept of a NED-Inchworm motor. Blocks of actuators on the left and right side of a so-called feed element can push the latter up or down in the plane. The clamping here is electrostatic.
© Fraunhofer IPMS
The picture shows two superimposed planes of two NED inchworm motors for combining an X and Y movement. The optics (lens matrix) is located on the upper plane, is connected to the feed elements and is consequently movable in X and Y direction.

Micropositioning platforms are systems in which a defined, usually centrally located surface can perform lateral, rotational, tilting or lifting movements as well as combinations of these. The drive succeeds via microactuators connected to the platform. The microactuators can be managed in particular by bending transducers.

Electrostatic bending transducers are being developed at Fraunhofer IPMS. They are used in the micropositioning platforms as a direct drive. An alternative indirect drive takes the form of an "inchworm" principle. This describes the stepwise displacement of a feed element alternating with a clamping. The feed element itself can be connected to a platform. The feed actuator is formed by the bending transducers. On the other hand, the clamping function can be electrostatic or provided by further bending transducers. With such a MEMS inchworm motor, precise and in sum large travels are possible.

Microactuators and micropositioning platforms belong to the discipline of micro- and nanosystems. Research focuses on dynamics, damping, reliability, tribology, electrostatics, actuation, and packaging and interconnection.

Applications of micropositioning platforms in a broader sense can be found, for example, in analytics for sample placement and micromanipulation or in optical analytics for particularly flat and mobile microscopy systems.

Privacy warning

With the click on the play button an external video from www.youtube.com is loaded and started. Your data is possible transferred and stored to third party. Do not start the video if you disagree. Find more about the youtube privacy statement under the following link: https://policies.google.com/privacy

MEMS based Micropositioning Platforms