Fraunhofer Institute for Photonic Microsystems provides ideal services for applying Micro-Electro-Mechanical Systems

Dresden, /

cleanroom for microsystems of the Fraunhofer IPMS with access to the institute building
© Fraunhofer IPMS
The cleanroom for microsystems of the Fraunhofer IPMS ist connected to the institute building.
lithography in the cleanroom for microsystems
Lithography in the cleanroom for microsystems.

The Fraunhofer IPMS carries out customer specific developments in fields of microelectronic and micro systems technology in Dresden, serving as a business partner that supports the transition of innovative ideas into new products. The Fraunhofer IPMS develops and fabricates modern CMOS technology products in its own clean room facilities, up to small pilot series production. With modern equipment and about 240 scientists, the range of projects and expertise covers sensor and actuator systems, microscanner, spatial light modulators, lifetronics and organic materials and systems.

The Fraunhofer Institute for Photonic Microsystems (Fraunhofer IPMS) features everything needed for the development, fabrication and integration of technologies for micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS): outstanding technology know-how, expertise in industrial manufacturing projects and the infrastructure needed including state-of-the-art equipment and 1,500 m² class 10 clean room facilities. Using this potential at the MicroNanoTec show, part of Hanover Fair and the only trade show worldwide that focuses exclusively on applied microsystems, nanotechnology and laser technology, from April 19 to April 23 the institute wants to especially support small and medium sized companies by applying innovative MEMS technologies.

Nowadays MEMS devices with diverse features can be found in a wide range of products such as printing machines, automotive vehicles, mobile phones or consumer electronics. They are used as sensors for process management and quality equipment as well as for telecommunication or medical technology. The approach of the scientists from Fraunhofer to compete for small and medium sized companies at the MicroNanoTec trade show is due to recent investments in modern infrastructure on the one hand and the increasing demand for specific process modules for MEMS development and fabrication on the other. »The fabrication of microsystems takes place in specialized silicon foundries, which are extremely expensive to build and to operate. So smaller companies are normally not able to afford this kind of infrastructure«, says Prof. Dr. Hubert Lakner – Director of the Fraunhofer IPMS. »Our business model allows companies without the needed equipment or facilities to develop and sell highly specialized and competible products, as well. With the recent investments into clean room infrastructure and equipment we cover the whole value chain from technology and product development to pilot-fabrication including feasibility studies, simulations of critical parameters and process flows, design, single process development and prototyping to mid size volume production.«

In order to learn more about these new opportunities for MEMS development and fabrication the Fraunhofer IPMS invites all MicroNanoTec visitors to visit the exhibition booth F1 as part of the IVAM exhibition area in hall 6 and to attend the presentation »MEMS Foundry Services @ Fraunhofer IPMS« within the forum »Innovations for Industry«. The special focus is on foundry services and the fabrication of MEMS devices using standard technologies with defined device characteristics and design rules that can be simulated according to customer requirements.