MEMS ultrasound transducers
Among the sensors, ultrasound transducers are the all-rounders that have established themselves for many tasks of detection in technical applications. The use of sensor systems for information exchange in the near distance and contact area is becoming increasingly important. For example, in gesture recognition or collision warning. Especially in the field of gesture recognition, miniaturized sensors with low energy consumption are increasingly required to be integrated into mobile web-enabled devices.
The novel ultrasound transducers in MEMS technology, which were developed in the business unit Monolithically Integrated Actuator and Sensor Systems of the Fraunhofer IPMS, can close this gap. The technology makes it possible to eliminate the membrane used in conventional ultrasound transducers. Instead, microscopically small bending actuators are used, which are made to deflect by a signal and vibrate in the chip plane. In order to generate sound, these bending actuators are arranged in sound chambers. The resulting sound exits the sound chambers via inlet and outlet slots.