Hardly any fast-growing technical industry can exist without components for microsystems technology in terms of sensors and actuators. In order to meet the growing demands on the performance of micromechanical components and expand the technical base for new applications, further miniaturization is essential. The miniaturization as part of a technical evolution further means, that novel principles for micro- and nanomechanical systems are required. For this purpose, the business unit »Monolithically Integrated Actuator and Sensor Systems« (MAS) is developing a new class of electrostatic bending actuators (NED) and tests these actuators in MEMS-based microsystems on various fields of applications.
© Fraunhofer IPMS
Electrostatic bending actuators (NED)
Out-of-plane and In-plane electrostatic bending actuators.