Micromechanical systems as nanoscopic electrostatic drives
Micromechanical systems are the key to the miniaturization of components and devices without which no fast-growing technical sector can manage. Whether it is acoustic transducers for the audio sector, transducers for the ultrasonic sector, drives for microscopically small pumps or valves, micro mirrors and optics for beam guidance, as well as beam shaping of light of various wavelengths or miniaturized varactors for signal amplification and adaptation of electrical antenna networks.
The micromechanical systems make it possible to produce components that have a much smaller footprint than is currently known. At the same time, the requirements for the lowest possible energy consumption of such components have increased. In the future, these components will be integrated into web-enabled and ultra-mobile devices characterized by a long battery life. In this context, wireless interfaces and processors play a decisive role in determining the energy requirements of such systems. Since the amount of space available for energy supply in such devices is very limited, all components have to make do with a very small energy budget.
This also means that actuating principles are required for micro- and nanomechanical systems that require minimal space and energy. The business unit "Monolithically Integrated Actuator and Sensor Systems" (MAS) develops electrostatic bending actuators for this purpose, which operate according to the bimorph principle. The Nanoscopic Electrosatic Drives, NED for short, are implemented in MEMS technologies and are suitable for a wide range of applications.