About us

Fraunhofer Institute for Photonic Microsystems

Left: 150 mm cleanroom (Maria-Reiche-Straße), Right: 300 mm cleanroom (Königsbrücker Straße).

The Fraunhofer Institute for Photonic Microsystems IPMS in Dresden is your access to know-how, expertise and modern R&D infrastructure in the field of optical sensors and actuators, integrated circuits, microsystems (MEMS/MOEMS) and nanoelectronics.

The institute has two facilities with a 150/200 mm cleanroom and a 300 mm cleanroom including state-of-the-art euipment for research and order processing.

The Fraunhofer IPMS is one of 67 institutes of the Fraunhofer-Gesellschaft, the leading organization for applied research in Germany, and also in Europe. It is devoted to research of practical utility. Relying on 13,000 employees, the Fraunhofer-Gesellschaft has a research budget of 1.3 billion euros. Two thirds of this sum are generated through industrial commissions and publicly financed research projects. The remainder is contributed by the Federal Government and the Länder as basic funding.

The Fraunhofer IPMS is part of the Fraunhofer Group Microelectronics (german abbreviation: VµE), and is engaged in various regional and international networks in the filed microsystems and photonics.

In order to meet the challenging demands of our customers, the Fraunhofer IPMS is certified according to the standard DIN EN 9001:2008 for research, development and fabrication of photonic microsystems including semiconductor and microsystem processes as well as integrated actuators and sensor technologies.

Board of Directors

  • Prof. Dr. Hubert Lakner

    Prof. Dr. Hubert Lakner

    Executive Director

    Fraunhofer Institute for Photonic Microsystems IPMS

    Maria-Reiche-Str. 2
    01109 Dresden

    • Phone +49 3 51 / 88 23-111
    • Fax +49 3 51 / 88 23-266
  • Prof. Dr. Harald Schenk

    Prof. Dr. Harald Schenk


    Fraunhofer Institute for Photonic Microsystems IPMS

    Maria-Reiche-Str. 2
    01109 Dresden

    • Phone +49 351 8823-154
    • Fax +49 351 8823-266

Main building: Maria-Reiche-Straße 2, Dresden

Our 15,000 square foot clean room stands at your service for all your technology development requirements, as well as for pilot production. Commissioned and online beginning in September 2007, our MEMS and CMOS facility is rated at Class 4 per ISO 14644-1, or Class 10 per U.S. Standard 209E.

» Directions

Branch CNT: Königsbrücker Straße 178

The business unit CNT deals with the certification of processes and materials on 300 mm wafers. More than 40 tools and an own clean room (class 1000) are available for the integration of customer processes and subnanometer characterization.

» Directions

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