Piezoresistive Pressure Sensors

Fraunhofer IPMS develops and manufactures piezoresistive pressure sensors with MEMS technologies in its own 1500 m² (15000 ft²) clean room (class 4 according to ISO 14644-1).

Capacitive Pressure Sensors

Capacitive pressure sensors in surface micro mechanics integrable as post CMOS module.

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pH-value Sensors

Fraunhofer IPMS develops ion-sensitive field-effect transistors (ISFETs), able to measure the pH value of their environment.

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MEMS Sensors

Fraunhofer IPMS develops and realizes customer-specific product solutions in sensor technology based on years of process expertise in bulk and surface micromachining.

Recently, we developed diverse physical and chemical sensors. Piezoresistive pressure sensors are adaptable to the pressure range needed by the application during the design phase. They can also be used in high-temperature environments. Photodiode arrays are applied in positioning systems, ion-sensitive field-effect transistors measure the pH levels in liquids. For these sensors we offer not only customer and application specific developments but also pilot fabrication in our clean room for microsystems.

In addition to our product oriented developments and pilot fabrication of sensors, we support clients and partners with leading-edge technologies for the individual processing of your MEMS sensors using our manufacturing know-how. For example, our Deep Silicon Etch (DSE) /Bosch process is used in the back-end of a client-specific fabrication of an IR thermopile.