Research & Development

At Fraunhofer IPMS an interdisciplinary team of engineers, physicists and chemists work with the support of the staff in our two clean rooms. In addition to the research and development of MEMS processes and devices as well as nanoelectronic technologies our work is focused on the integration of our development results in application-oriented systems.

We are your competent partner for all questions relating to MEMS and nanoelectronics. Together with our customers we develop innovative solutions for nanoelectronic and microsystems technology.

Applied R&D services for our customers in the fields of


Spatial Light Modulators


MEMS Scanners


Wireless Microsystems


Environmental Sensing


Center Nanoelectronic Technologies (CNT)


Smart Micro Optics


Micromachined Ultrasonic Transducers


MEMS Sensors


Monolithically Integrated Actuator and Sensor Systems


End-of-Line Standard Substrates