Microfluidic Control and Switching Valves

Whitepaper #4: Silicon-based Microfluidic Control and Switching Valves

Fraunhofer IPMS

In this paper, the design and implementation of two novel electrostatic 2/2-way microvalves are reported. The innovation claims include: 

  • (1) implementation of an in-plane electrostatic driving mechanism in a microvalve device using Nanoscopic Electrostatic Drive (NED) bending actuators
  • (2) parallelization of flow orifices over the device minimizing the hydraulic device resistance, thus enabling high throughput flow rates up to 200 sccm at 1 bar for gases.

Content:

  1. Background / State-of-the-art
  2. Description of the novel valve system
  3. Simulation results

Please register your email address using the form below. You will then receive the download link to the paper.

Download Whitepaper #4

Silicon-based Microfluidic Control and Switching Valves

Please fill in all the obligatory fields!
Please fill in all the obligatory fields!
Please fill in all the obligatory fields!
Please fill in all the obligatory fields!
Please fill in all the obligatory fields!
Please fill in all the obligatory fields!

Privacy Statement

All use of your personal data is confined to the purposes stated above, and is only undertaken to the extent necessary for these purposes. The Fraunhofer IPMS collects, processes and saves users' personal data in the context of our whitepapers exclusively under compliance with the applicable data protection regulations. This approval may be revoked at any time.

I hereby agree that Fraunhofer IPMS saves and uses the provided data to inform via email about our current research and services. Fraunhofer points out that this approval may be revoked at any time by sending an email to pr@ipms.fraunhofer.de.

Without express written approval  of Fraunhofer IPMS a transfer of whitepapers to third parties is not allowed.

Please fill in all the obligatory fields!