Whitepaper #4: Silicon-based Microfluidic Control and Switching Valves#
In this paper, the design and implementation of two novel electrostatic 2/2-way microvalves are reported. The innovation claims include:
- (1) implementation of an in-plane electrostatic driving mechanism in a microvalve device using Nanoscopic Electrostatic Drive (NED) bending actuators
- (2) parallelization of flow orifices over the device minimizing the hydraulic device resistance, thus enabling high throughput flow rates up to 200 sccm at 1 bar for gases.
- Background / State-of-the-art
- Description of the novel valve system
- Simulation results