Mechanically Interconnected Micromachined Ultrasonic Transducers

Whitepaper #5: Mechanically Interconnected Micromachined Ultrasonic Transducers

Fraunhofer IPMS

Ultrasound transducer are utilized in a large number of applications. These range from medical imaging, nondestructive testing to parking sensors. Micromachined ultrasonic transducers (MUTs) are a new class of ultrasound transducers, which were presented in 1994. Since that time, a significant amount of research has been conducted to improve the device performance. A recent step in the evolution are mechanically interconnected MUTs (MIMUTs) that profit from the advantages of conventional MUTs and simultaneously overcome their limitations.

The utilized fabrication techniques of microtechnologies are beneficial for the devices regarding the following aspects:

  • Efficient and reproducible batch fabrication
  • Integration of digital and analog circuits, namely ASICs
  • Miniaturization

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Mechanically Interconnected Micromachined Ultrasonic Transducers

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