MEMS Technologies

MEMS technologies are used for the manufacture of MEMS devices, such as sensors or actuators. These technologies are generally classified into two broad categories: bulk MEMS and surface MEMS.

Fraunhofer IPMS specifically develops both bulk and surface MEMS technologies. These technologies are based on technology modules. Various MEMS devices can be developed and constructed using our technology modules.

MEMS / MOEMS

Bulk MEMS

  • 3D structures in silicon
  • Applications:
    Optical scanners, pressure sensors

MEMS / MOEMS

Surface MEMS

  • Thin-film Surface MEMS
  • MEMS integrated with CMOS
  • Application:
    Spatial Light Modulators CMUT

CMOS & »Active« Silicon

  • High-Voltage CMOS
  • Photodiodes
  • pH Sensors