Fraunhofer Institute for Photonic Microsystems
200 mm MEMS cleanroom
- Low volume & high mix
- 24/5 - 3 shift operation
- 45 engineers + 45 operators and maintenance technicians
- i-line (400nm L&S) and DUV cluster (130nm L&S)
- ~1,000 wafer starts per month
- CMOS compatibility
- Class 10 (ISO 4) on 1,500 m²
- ISO 9001:2015 certification
- MES for planning, traceability and documentation