MEMS Cleanroom#

MEMS Cleanroom

200 mm MEMS cleanroom#

  • Low volume & high mix
  • 24/5 - 3 shift operation
  • 45 engineers + 45 operators and maintenance technicians
  • i-line (400nm L&S) and DUV cluster (130nm L&S)
  • ~1,000 wafer starts per month
  • CMOS compatibility
  • Class 10 (ISO 4) on 1,500 m²
  • ISO 9001:2015 certification
  • MES for planning, traceability and documentation

back to

MEMS Technologies Dresden