Cleanrooms

Our Fraunhofer IPMS cleanrooms:

200 mm

  • MEMS Technologies Dresden: 1500 m² cleanroom (class 4 according to ISO 14644-1)
  • Technology development up to pilot production of innovative microsystems on 200 mm 
  • Micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS)

 

300 mm

  • 2700 m² class 6 and 3 clean room (according to ISO 14644-1)
  • Development services on 300mm wafers in the area of FEoL and BEoL 
  • Services on ultra large scale integration level 
  • Analytics, Metrology & Characterization
 

Fraunhofer IPMS

200 mm MEMS Cleanroom

 

Fraunhofer IPMS

300 mm CMOS Cleanroom

 

Fraunhofer IPMS

Analytics, Metrology and Characterization

 

Fraunhofer IPMS

300 mm Screening Fab

  • Process development
  • Equipment evalutation
  • Wafer services