MEMS Toolpark
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Process Area |
SPECIFIC APPLICATION |
SUPPLIER |
---|---|---|
LITHOGRAPHY | ||
i-Line | i-Line Lithography for 400 nm L / S | NSR-2205i 14E2 | Nikon |
Spin and Spray Coating | SK-80EX | Screen | |
Contact, Proximity | Double-side Mask Aligner | MA 200 GEN 3 | SUSS |
High Topology Spray Coater | EV101 | EVG | |
NSR-S210D Hi NA-248nm Exposure Scanning System | Nikon
DUV litho Track | TEL ACT8
MT3000IR OVL-control | MueTec
Grinder | DISCO Corp.