Laser Projection

2D LinScan microscanner in ceramics housing for laser projection applications.

3D TOF Camera

Optical scanning head of a 3D TOF camera with integrated MEMS scanner array of Fraunhofer IPMS.

Spectral Analysis

Miniaturized quantum cascade laser (QCL) module with integrated MEMS scanning grating device of Fraunhofer IPMS.

VarioS® Microscanner Configurator

The VarioS® microscanner configurator allows customers to receive customized demonstrators within a few weeks time and enables them to test applications rapidly.

Resonant Microscanners

Microscanners of various sizes. Mirror diameter up to 5 mm.

MEMS Scanners

To date, more than 50 different resonant scanners have been designed and manufactured. They are made to deflect light either one-dimensionally or two-dimensionally or for high-speed optical path length modulation. Scan frequencies from 0.1 kHz to 50 kHz have been successfully executed. Applications range from reading barcode and data code, through 3D metrology, and right up to laser projection and spectroscopy. An example is a MEMS scanner with integrated diffraction grating for spectroscopic applications which HiperScan GmbH, a Fraunhofer IPMS spin-off, has been distributing since 2007 a novel infrared wavelength micro spectrometer. Furthermore, the Fraunhofer IPMS is engaged in custom-designed scanning mirrors, e.g. for Fourier Transform spectrometers, confocal microscopy, highly miniaturized displays, ultra-compact laser projection systems, endoscopic image acquisition as well as triangulation.

In addition to resonant scanners, quasi-static micro-scanners are also under development. These activities are geared toward applications such as laser beam positioning and switching.

The internet platform www.micro-mirrors.com was introduced, allowing customers to define and order resonant micro-scanners that are suitable for their specific applications. Thanks to a building-block approach, we are able to offer reasonably-priced devices with a short lead time.

Watch our 1D and 2D scanner mirrors in action

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Press Releases

Press Release | April 26, 2016

MEMS-Technologie ebnet Weg für alltagstaugliche Spektrometer

Press Release | January 20, 2015

Fraunhofer IPMS develops MEMS technology for spectroscopy in the medium infrared range