MEMS Sensors

Fraunhofer Institute for Photonic Microsystems

micro-mechanical pressure sensors
Micro-mechanical pressure sensors.

Fraunhofer IPMS develops and realizes client-specific product solutions in sensor technology based on years of process expertise in bulk and surface micromachining.

Leading international, industrial clients can successfully bring to market automotive and metrology applications based on our MEMS technology. Products that demonstrate our development and production competencies include pressure sensors for oil pressure control in automatic transmissions, photodiode arrays for use in positioning systems, and ion-sensitive field-effect transistors for measuring pH levels in liquids.

Using our manufacturing know-how, we support clients and partners with leading-edge technologies for the individual single-processing of your MEMS sensors. For example, our Deep Silicon Etch (DSE) /Bosch process is used in the back-end of a client-specific assembly of an IR thermopile application.

Products and Applications

  • Photodiode arrays
  • Backend for IR thermopiles

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