MEMS Scanners

Fraunhofer Institute for Photonic Microsystems

MEMS scanner chip and device

Resonantly oscillating scanner mirrors are the technology of choice, if image information is to be distributed in minimal space. At Fraunhofer IPMS you find technological expertise for device and systems development as well as application know-how from over 10 years of development work.

Over the past years, the Fraunhofer IPMS has developed more than 40 variants of micro scanning mirrors used by its customers for one- and two-dimensional deflection of light as well as optical path length modulation. An example is a one-dimensional MEMS scanner developed for bar code readers which Intermec Technologies Corporation, U.S.A. has been using in its so-called ScanEngine since 2005. Another example is a MEMS scanner with integrated diffraction grating for spectroscopic applications which HiperScan GmbH, a Fraunhofer IPMS spin-off, has been distributing since 2007 in a novel infrared wavelength micro spectrometer. Furthermore, the Fraunhofer IPMS is engaged in custom-designed scanning mirrors, e.g. for Fourier Transform spectrometers, confocal microscopy, highly miniaturized displays, ultra-compact laser projection systems, endoscopic image acquisition as well as triangulation.

Watch our 1D and 2D scanner mirrors in action.

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