Over the past years, the Fraunhofer IPMS has developed more than 40 variants of micro scanning mirrors used by its customers for one- and two-dimensional deflection of light as well as optical path length modulation. An example is a one-dimensional MEMS scanner developed for bar code readers which Intermec Technologies Corporation, U.S.A. has been using in its so-called ScanEngine since 2005. Another example is a MEMS scanner with integrated diffraction grating for spectroscopic applications which HiperScan GmbH, a Fraunhofer IPMS spin-off, has been distributing since 2007 in a novel infrared wavelength micro spectrometer. Furthermore, the Fraunhofer IPMS is engaged in custom-designed scanning mirrors, e.g. for Fourier Transform spectrometers, confocal microscopy, highly miniaturized displays, ultra-compact laser projection systems, endoscopic image acquisition as well as triangulation.