Fraunhofer IPMS

Main Building at Maria-Reiche-Straße in Dresden, Germany.

Fraunhofer IPMS

Center Nanoelectronic Technologies (CNT) at Königsbrücker Straße in Dresden, Germany.

Fraunhofer IPMS

150/200 mm MEMS/MOEMS cleanroom at Maria-Reiche-Straße in Dresden, Germany.

Fraunhofer IPMS

300 mm cleanroom of CNT at Königsbrücker Straße in Dresden, Germany.

Profile

Fraunhofer IPMS Budget

Fraunhofer IPMS Staff

The Fraunhofer Institute for Photonic Microsystems IPMS in Dresden is your access to know-how, expertise and modern R&D infrastructure in the field of optical sensors and actuators, integrated circuits, microsystems (MEMS/MOEMS) and nanoelectronics. The Fraunhofer IPMS is one of 67 institutes of the Fraunhofer-Gesellschaft, the leading organization for applied research in Germany, and also in Europe. It is devoted to research of practical utility. Relying on 13,000 employees, the Fraunhofer-Gesellschaft has a research budget of 1.3 billion euros. Two thirds of this sum are generated through industrial commissions and publicly financed research projects. The remainder is contributed by the Federal Government and the Länder as basic funding. The Fraunhofer IPMS is part of the Fraunhofer Group Microelectronics (german abbreviation: VµE), and is engaged in various regional and international networks in the filed microsystems and photonics.

In order to meet the challenging demands of our customers, the Fraunhofer IPMS is certified according to the standard DIN EN 9001:2008 for research, development and fabrication of photonic microsystems including semiconductor and microsystem processes as well as integrated actuators and sensor technologies.

The institute has two facilities in Dresden, Germany:

Our 15,000 square foot clean room at Maria-Reiche-Straße 2 is at your service for all your technology development requirements, as well as for pilot production. Commissioned and online beginning in September 2007, our MEMS and CMOS facility is rated at Class 4 per ISO 14644-1, or Class 10 per U.S. Standard 209E.

The business unit CNT at Königsbrücker Straße 178 deals with the certification of processes and materials on 300 mm wafers. More than 40 tools and an own clean room (class 1000) are available for the integration of customer processes and subnanometer characterization.

Institute Management

Hubert Lakner

Contact Press / Media

Prof. Hubert Lakner

Executive Director

Fraunhofer Institute for Photonic Microsystems IPMS
Maria-Reiche-Str. 2
01109 Dresden

Phone +49 351 88 23-111

Fax +49 351 88 23-266

Harald Schenk

Contact Press / Media

Prof. Harald Schenk

Director

Fraunhofer Institute for Photonic Microsystems IPMS
Maria-Reiche-Str. 2
01109 Dresden

Phone +49 351 88 23-154

Fax +49 351 88 23-266