COMEDD Ausrüstung

Fraunhofer-Institut für Photonische Mikrosysteme

Pilotlinie: OLED auf starren Substraten — Substrate 370 x 470 mm²

Gerät Typ / Hersteller
Laser ablation 3D Micromac
Ultrasonic pre-clean system UCM-4 | UCM
Double-sided single-panel cleaning processor SSEC MODEL 3402 | SSEC
Automatic screen and stencil printer X4 Prof | EKRA
Thermal treatment Carbolite
Deposition by thermal evaporation Sunicel 400 plus | Sunic System
Deposition by OVPD Aixtron
Encapsulation system Vision Technology
Pretest MRB Automation
Scriber AI PO LI
Glass encapsulation (Inline) GLT
Scriber MP500A Scriber | MDI Schott
OLSB 4 - Structuring (Screen cleaner) Kolb
Lamination SDL 50 | Fetzel

Pilotlinie: OLED on CMOS — Wafer 150 mm und 200 mm

Gerät Typ / Hersteller
Structuring Mechatronic
Cleaning / Etching Wet bench | Arias, Semitool
Digestorium | Köttermann
Washing Machine | Miele
Clean oven CLO2AH | Koyo Thermo Systems
Deposition by thermal evaporation Sunicel 200 plus | Sunic System
Semi-automated wafer bonding system EVG510 and IQ-ALIGNER 200 TN | EVG
Glass encapsulation Sunic / GLT
Vacuum drying oven Binder

PLED-Produktionslinie: OLED on CMOS — Wafer 200 mm

Gerät Typ / Hersteller
Etching / Sputtering Clustex 200 | Leybold Optics
Spin coating EVG120 | EVG
Nitrogen oven MB-OV | MBraun
Etching, deposition by thermal evaporation and Barix™ thinfilm encapsulation Helisys | ANS Korea
Full-automated wafer bonding system Hercules | EVG
Wafer prober Pegasus PA200 | Wentworth
Microscopes Eclipse L200 | Nikon
Ellipsometer M-2000U | J. A. Woollam
Particle scanner Surfscan 7700 | KLA Tencor

Forschungslinie: Rolle-zu-Rolle — Metall- und Polymerbänder 300 mm

Gerät Typ / Hersteller
Deposition by thermal evaporation RC300MB | Von Ardenne
Rewinding and inspection system Spanntec and ISRA Vision
Coating, printing and lamination unit under inert atmosphere Coatema and GS Glovebox

Prototyplinie / Weitere Systeme

Gerät Typ / Hersteller
Material test deposition system BESTEC
Vertical inline deposition system VES400/13 | Applied Materials
Auto drive stencil printer S70 | Mechatronic Engineering
Modular vacuum sublimation unit DSU-1.0 | CreaPhys
Climatic chamber Vötsch
Various gloveboxes MBraun

Messtechnik / Charakterisierung

Gerät Typ / Hersteller
Microscopes Eclipse L200 & L300 | Nikon
Profilometer Alphastep IQ | KLA Tencor
Particle scanner Surfscan 6200 | KLA Tencor
Display test system DMS 401 | Autronic Melchers
Display test system CAS 140B | Instrument Systems
Video photometer PR 905 | Photo Research
IR camera Variotherm Head II | Infratest
Solar cell test system Aescusoft
Life time test system Botest